MLGP

Refer to pages 17 through 22 for safety instructions, actuator precaution and auto switch precautions. Holding the Unlocked Condition (20 through 32) Caution 1.

MLGP

Refer to pages 17 through 22 for safety instructions, actuator precaution and auto switch precautions. Holding the Unlocked Condition (20 through 32) Caution 1.

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

Environment

radius [mm] (Reference values) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.

AC Servo Motor Driver (Pulse input type)

Parameter Configuration using Setup software (MR Configurator2TM)17 5.1 Setup software (MR Configurator2TM) . 17 5.1.1 Installation Method .17 5.2 Basic driver set-up for Initial Test Drive . 17 5.2.1 Start up the Setup software (MR Configurator2TM) .18 5.2.2 System Settings .19 5.2.3 Model Selection .19 5.2.4 Driver ON LINE Check .20 5.2.5 Help Function .20 5.3 Parameter setting (Driver

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IO-Link unit EX600-LBB1 (Class B) 3Ch 46 -94No.EX-OMX1011 EtherNet/IPTM configuration assembly The Configuration data per unit type is described below.

Round Type Hydraulic Cylinder

I 4 x LD LH MM A K NC Width across flats NA Y X NB LT Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

OMR0031

Refer to section 17.

Compact 5-Port Solenoid Valve

12.5 14.5 Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions n L 17 18 19 20 21 22 23 24 L1 278.5 287.5 296.5 305.5 314.5 323.5 332.5 341.5 L2 196.4 205.4 214.4 223.4 232.4 241.4 250.4 259.4 L3 310.5 323 323 335.5 348 348 360.5 373 L4 300 312.5 312.5 325 337.5 337.5 350 362.5 L5 16 18 13.5 15 17 12.5 14 16 46 JSY1000/3000/5000 Series Type 10/Side Ported Dimensions

CA2

84 2.5 25 146 1/4 up to 600 11 35 32 70 27 52 20 13 40 12 17 58 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 11 35 32 85 27 64 20 15.5 40 10 17 58 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 13 40 37 102 32 78 25 18.5 52 14 21 71 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 116 4 40 204 1/2 up to 750 16 40 37 116 41 92 30 20 52

HRX-OM-Q026

PV SV 5.23 Communication Function HRSH Series 5-84 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 46. Select a function with [] key or [] key, and press [SEL] to enter.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .72600 lb

Refrigerated Air Dryer

D A B Grommet with membrane Power cable outlet (17) Dimensions (mm) A 230 B C D Circuit breaker Model 32 B D IDFA4E, 6E, 8E, 11E IDFA15E1 67 179 43 258 77 158 C E A IDFA22E to 75E Power cable outlet (17) (Wire diameter 9 to 11) F (mm) Dimensions E D C B A F Model Signal cable outlet (Wire diameter 17) Grommet with membrane IDFA22E IDFA37E IDFA55E IDFA75E 59 125 40 25 46 39 60 Terminal block

AC Servo Motor Driver (SSCNET /H Type)

Once the application starts, the screen below will be displayed. -17- 6.2.2 System Settings From Project menu select New, the New project window will be displayed. 6.2.3 Model Selection The Mitsubishi Electric Corporation series will be displayed in the model selection list. Please select MR-J4-B if using the LECSS2-T.

ZR

1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit diagram Individual spacer (ZR1-R1-4) PV PD EXH PS Function plate (ZR1-RV3-4) ZX X X X X X PS PE ZR SOL.C ZM SOL.A SOL.B Vacuum switch X X X X PD PV ZH Release valve ZU Vacuum switch valve

MLGP

17 Series MLGP Operating Range when Used as Stopper Warning 1.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) 37.2 M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port)

MLGP

17 Series MLGP Operating Range when Used as Stopper Warning 1.

SV

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 3 160.5 150 129.8 15.5 4 173 162.5 140.3 16.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300