Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

Air Cylinder Series MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

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Aw/1CB:ble l (mm) Y12A 2S*g(>P'< 10{) 32~g{ 125 8 46 M30 x 1.5 64.:U 42 boc~~ze . d 1-1 B C D 27 28~oe. 72ji Y-14A 140 8 48 105 M30 x 1.5 47 36:21 NT-12 125, 140lM30 x 1.5 18 46 53.1 44 30 NT16 160 /M36x1.5 21 55 63.5 53 M36x 1.5 32 ~~' 4072J Y-16A 110 80~J 34 46 ' 1 160 8 55 * Use a single knuckle 101n1 or a double knuckle JOint Individually.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

CG5-S

to 800 1/8 30 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 93 147 50 32 to 1200 1/4 35 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 109 172.5 63 32 to 1200 1/4 35 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 109 174 80 37 to 1400 3/8 40 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 130 208 100 37 to 1500 1/2

Possible to transfer a workpiece at low-speed.

Applicable shaft type: W MSU Y = X = Long shaft side Long shaft side Long shaft side CRJ Long shaft side CRA1 X = CRQ2 Short shaft side Short shaft side Short shaft side MSQ Y = Y = Short shaft side MSZ Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) X 2 to 18 2 to 20 17 to 30 18 to 32 18.5 to 36 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 X 2 to 18 2 to 20

MTS

46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

Profile Design ISO/VDMA Air Cylinder Series CP95

joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 1.8-12 ISO/VDMA Air Cylinders Series CP95K

TABLE OF CONTENTS

WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

MK

45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20 61 67 14 18 6 6.2 CC M10 x 1.5 40 11.5 53 23 65 46 22 77 88 18 22 8 8.2 M10 x 1.5 40 11.5 52.5 23 65 46 22 76.5 88 18 22 8 8.2 RB J Mounting arms for width across flats D-X 20Data When installing the arm for the parllel section at the rod end, the strength of the piston rod might be insufficient depending on the direction in which

HRX-OM-R016

Accessory Weight12 kg 47 46 1 For water -cooled type. 2 Use the product in conditions where freezing will not occur.

CP95

(mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60 25 63 14 27 11 11.5 18 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 6-13-12 12 Series CP95 ISO/VDMA Cylinder: Standard Type Double

CP95

9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

ZX

Operating pressure range Operating temperature range Filtration efficiency Element Weight ZX ZR ZM ZH Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP1 Refer to page 13-2-13 to 13-2-18 for details.

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.