SV

for 12 SV3000 12 02 12 stations 2 stations Specified layout (2) One-touch fitting for 12 (up to 24 solenoids possible.) 20 20 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

V

Max 12 Stations.

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

5 Port Solenoid Valve, Series VQC

(12) 40.5 2 PWR 25 18.5 3 9.5 7.5 4-M8 2-M12 M3 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

SZ3000

Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Fieldbus System

) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 A 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 =

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 C6: One-touch fitting ass'y for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) 21.5 Dimensions Equation L1 = 11n + 20 n: Station (Max. 24 stations) 7.5 L n 1 2 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5

Piping: Body Ported/Common SUP Common EXH, Stations: 12 Stations, A, B Port: -, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 20 (5 Port/Body Ported Common SUP Common EXH), Stations: 12 Stations

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 12 Stations, A B Port Size: -, P R Port Thread: -

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.C. 2-3-10 11 Plug-in Unit Series SQ1000 Manifold Specifications Porting specifications (4) 1 station weight (g) (4) (3) 5 station weight (g) Applicable solenoid valve Type of connection (1) Applicable station Port size Base model 1(P), 3(R) 4(A), 2(B) Port location Port size F kit: D-sub connector 1 to 12 stations 420 20 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 1 to 12 stations

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Valve stations F: D-sub connector P: Flat cable connector (26 pins) Note Note Stations Stations Symbol 02 Symbol 02 2 stations 2 stations Note 1) Double wiring specification Double wiring specification ... ... ... ... ... 12 13 12 13 Connector mounting position 12 stations 12 stations 13 stations 13 stations Symbol D Mounting position Specified wiring Note 2) Specified wiring (up to 25 solenoids

Table of Contents

11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588