SX

(Mounting hole for manifold) 2-4.2 Manual override (Mounting hole for manifold) 42 18.4 (A, B port) 2-One-touch fittings (Press and turn for the locking type) Applicable tubing O.D.: 8 10 Applicable tubing O.D.: 8 10 (Light/Surge voltage suppressor) (5.5) (5.5) 48.6 (Light/Surge voltage suppressor) Polarity indication 48.6 33.3 31.5 33.3 31.5 6.7 300 10 B +A COM (Lead wire length) 107.5 1

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-41 VV5Z5-42 Before using, refer to page 3-3-8.

ZP

Connection 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

KJ

fitting size 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 18.5 KQ2R08-12 42 4.6 12 20 12 KQ2R10-12 18.5 44.5 41.5 32.8 33 23 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

25

(mm) Installation distance Detection range 10 45 25 100 Detection range 50 180 423 RoHS Ionizer IZS40/41/42 Series How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Emitter

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Table of Contents

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

Air Fittings & Tubing

Effective area (mm2) Weight (g) L M A D Nylon Urethane 2 1.8 3.2 4 6 KQ2R23-04 KQ2R04-06 9.6 33.5 34.5 3.4 2.9 15.5 18.5 17.5 10.4 4 KQ2R04-08 36.5 5.6 4 2.0 8 18 16 KQ2R04-10 12.8 39.5 3.3 10 18.5 2.5 KQ2R06-04 4 12.8 37 4 4 21 6 KQ2R06-08 37 2.5 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 10.4 3 10 18.5 KQ2R06-12 42 15.2 4.7 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 20 18.5 KQ2R08-12 42 4.6 12

CL

90 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 39 43 54.5 65.5 28 33 40 49 35.8 39.8 49.4 58.4 42 42 48 56 10 10 10 10 3.2 3.2 4.5 4.5 16 20 22 30 5.5 5.5 6.6 6.6 28 28 28 30 25 30 35 40 MGG MGC MGF Clevis/CLG1DN CY1 Clevis Bore (mm) MY1 BZ TV TZ CZ TW L RR TX TY TE TF TH TT CDH10 20 25 32 40 8+ 0.058 0 10 + 0.058 0 12 + 0.070 0 + 0.070 0 14 29 33 40 49 42 42 48 56 44 35.8

C85

10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13

CJ2

71 70 71.5 89 88 87.5 47 46 47.5 D-A7 D-A80 101 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F 10 17.5 100 D-A7/A80 16 20.5 101.5 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL D-F7BAVL 10 23.5 D-A73C D-A80C 10 3.5 10 17.5 29.5 41.5 16 26.5 D-F7V/F7BAVL 10 16 10 16 10 16 20 23 23 26 19 22 D-F7WV 16 4 9.5 18 30 42 72 48 90 102 D-J79C 10 16 0.5 1 7 6.5 14.5 15 26.5

Table of Contents

10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 10-SS5Y3-41(-Q) 10-SS5Y3-42(-Q) 10-SS5Y5-41(-Q) 10-SS5Y5-42(-Q) 10-SS5Y7-42(-Q) 10-SY340 10-SY540 10-SY740 Single base/B mount Common SUP, Common EXH 2 to 20 stations Note 1) Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations A, B port Location Direction Base Side Porting specifications 1 4 1 4 M5 x 0.8, 1 8 P, EA, EB port

ISO Standard Hydraulic Cylinder

24 24 25 42 10 50 16 11 3/8 58 63 25 to 800 77 77 9 98 118 84 M8 x 1 9 M27 x 2 36 33 58 19 36 36 30 21 32 50 10 56 18 13 1/2 66 80 25 to 800 96 96 11 119 143 96 10.5 M33 x 2 41 32 M10 x 1.25 75 13 45 45 41 26 41 60 16 70 17 17 1/2 74 100 25 to 1000 115 115 13.5 138 162 113 14.5 M42 x 2 42 42 M14 x 1.5 90 16 56 56 50 22 52 72 16 90 22 19 3/4 86 Bore size (mm) RD S SS Y Z ZZ V 40 51 6.5 161.5

ISO Cylinder

GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

Fluoropolymer Piping Equipment

39 37 10 10 LQ3R52-M 1/2" 34 42 LQ3R53-M 3/4" 34.5 44 16 16 LQ3R61-M 25 1/2" 42 7 26.5 24 14 28 32 64 61.5 LVN 10 10 LQ3R62-M 3/4" 42.5 52 16 16 LQ3R63-M 1" 53 22 22 50 LQHB 8 30 26 18 36 41 78 74 49 TL TIL Inch Size TLM TILM Model Applicable tubing O.D.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Z With rod boot ZZ CD-G02 CD-G25 CD-G03 B TT TV TW TX TY TZ Z CD CX CZ L RR V TE TF TH ZZ 159 + l 25 30 35 29 33 40 14 16 20 11 13 15 38 45.5 54 8 10 12 10 10 10 5.5 5.5 6.6 42 42 48 16 20 22 3.2 3.2 4.5 35.8 28 28 28 43.4 20 25 32 118 125 131 150 (159) 139 146 155 Up to 200 Up to 300 Up to 300 138 + l 168 + l 39.8 48 147 + l 177 + l 49.4 59.4 153 + l 198 + l 178 (187) 170

CQS

(mm) Stroke range (mm) B 22 22 29.5 32.5 B 17 17 19.5 22.5 CL 39.5 40.5 52 57.5 CL 34.5 35.5 42 47.5 CD hole H10 Rod d9 12 16 20 25 5, 10 Bore size (mm) L + Stroke B + Stroke CL + 2 (Stroke) RR CB CD CT CU CW CX CZ L L1 A + 2 (Stroke) 12 16 20 25 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 Rod end male thread Double clevis