Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

13

O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Air Cylinder Series CA2

71 13 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 116 4 40 204 1/2 Up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, refer to page 367.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

AW

AW10 AW20(K) AW30(K) AW40(K) AW60(K) AR40(K)-06 No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

39.7 28.2 49.1 AS431F-04-10ST AS331F-N03-11ST 16.2 18.5 21 32.6 58 10 49.4 21 25.8 3/8" 17.9 23 16.2 43.7 32.6 53.5 12 55.8 28.6 63.8 1.5 24 R 1/2 AS431F-04-12ST AS431F-N04-11ST 20.9 22 36.3 61.7 12 52 16.2 3/8" 17.9 25.8 21 26.8 19.4 49.4 32.6 55.3 12 1/2" NPT 1/2 23.8 21.7 29 26.8 63.8 1.5 55.8 AS431F-N04-13ST Reference dimensions of M5 x 0.8, R threads after installation.

Series SV

SV1000-05SV2000-00SV2000-M1SV3000-00SV1000-M1SV1000-06(For mounting on even numbered station) (For mounting on odd numbered station) SV3000-M1SV4000-M1SV4000-00Accessory Round head combination screw SX3000-22-9 (M2 x 39.5) Series Gasket SV1000 SX3000-57-4 SV2000-21-7 (M3 x 53) SV2000 SX5000-57-6 2 4 (B) Symbol SV3000-21-4 (M4 x 57) 2 4 SV3000 SX7000-57-5 4 2 SV2000-21-8 (M3 x 69.5) SV4000

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1, LQ2 2 LQ1 LQ2 Body class Symbol 2 3 4 5 6 LQ1 LQ2 Applicable fitting Body

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 D2 L2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

/

(mm) Model Av x 10-6m2 Cv converted 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1 (25A) 46 58 130 220 290 1.9 2.4 5.3 9.2 12.0 VXEZ2230-02 VXEZ2230-03 VXEZ2240-04 VXEZ2350-06 VXEZ2360-10 550 10 0.7 0 760 1300 1480 15 20 25 1.5 1.0 Weight of grommet type. Add 10 g for conduit, 30 g for DIN terminal, and 60 g for conduit terminal type respectively.

JIS Standard Hydraulic Cylinder

Auto switch model Cylinder model Bore size (mm) 80 63 50 40 32 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Note 2) BA7-063 BA7-063 BA7-080 BS5-160 BS5-180 CH2E/H/F D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 The figure shows how auto switch models, D-M9(V), M9W(V), and M9A(V) are mounted.

Modular Type Regulators Series AR

Description Material Model Color Zinc die-cast AR10, AR20(K) AR Platinum silver 1 Body Aluminum die-cast AR25(K) to AR60(K) Polyacetal AR10, AR20(K) to AR40(K)-06 AL Black 2 Bonnet Aluminum die-cast AR50(K), AR60(K) AW Replacement Parts Part no. AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR40(K)-06 AR60(K) AG No.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

HRX-OM-S004

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

LEC-OM07605CN

PB07 ] () 4 1 8 1 (1+) 6 16 6 6.5 2 X-Y22 (1) 2 1 2 21 (a) PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB07 PG1 (2) 2 2 2122 ([Pr. PB06]) 22 (a) PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB06 GD2 PB07 PG1 6 17 6 (3) 2 2[Pr. PB07] 1 1 2 [Pr. PA09] 1 3 4 21([Pr. PA08]:_ _ _ 0) 21( ) 5 22([Pr. PA08]:_ _ _ 4)([Pr. PB06]) 6 7 (4) [Pr.

Flow Control Equipment

AQ340F-06 04 06 06 4.3-3 4.0-2 Precautions Be sure to read before handling.