13

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

JXCx-OMT0023

Ambient temperature is over 40 . Lower the ambient temperature of servo motor. the servo motor is over 40 . Ambient temperature is 40 Check 2). or less. 2) Servo motor is Check the effective load ratio. The effective load ratio is too high. Reduce the load or take heat dissipation measures. overheated.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 00N (NPT)

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 00T (NPTF)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 00F (G)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 00N (NPT)

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 00T (NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 01 (Rc1/8)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 01T (NPTF 1/8)

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: N7T (1/4" One-touch Fitting NPTF)

Piping: Body Ported/Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPT

Piping: Body Ported/Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPTF

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: G

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPT

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPTF

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: Rc1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPTF 1/8