High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

CL

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

CM2

301 to 400 156 160 160 165 401 to 500 181 185 185 190 20 25 32 40 30 32 32 41 36 36 36 46 24 24 24 25 With Rod Boot l ZZ Symbol Z 1 to 50 143 147 149 181 Stroke Bore size (mm) 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100 76

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ZS-20-5A-50 . 1 pc.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

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535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

XL-OMY0002

9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation, MANIFOLD BLOCK, VALVE, SS5V3 MANIFOLD SV3000, 21, SS5V3 NO SIZE RATING, .28965 lb

The use of 34 pin connectors allows up to 16 stations with double solenoids.SV4000 series valve, Single, double solenoid and 3 position available, Service life: 50 million cycles or more, Supply pressure: 0.5MPa, Unrestricted mounting orientation SS5V3 MANIFOLD SV3000. MANIFOLD BLOCK. VALVE. SS5V3 NO SIZE RATING. .35200 lb. 21.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-r a Stations fUfiotlo ihl drb rsft vJ3000-21-1A End cover srde of --Frqclsaqq!

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-r a Stations fUfiotlo ihl drb rsft vJ3000-21-1A End cover srde of --Frqclsaqq!

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CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 15mm 10mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 20mm 15mm 10mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39

Cylinder with Lock Series CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 10mm 15mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 15mm 10mm 20mm 20mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

3 Port Air Operated Valve Series SYJA300 1

Free 300/50 VPA342: VP300-27-1A VPA542: VP500-27-1A VPA742: VP700-27-1A Bracket (With screw) Option N.C. N.O. Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

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65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

XM, XY

9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi