CNS

56 34 CL1 A B Hs 30 (33) 36 Hs MLGC Auto switch ( ): Denotes the values of D-F5LF.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

150 n x 5.5 60 5 5H9 (+0.030 0 ) depth 56 5H9 (+0.030 0 ) depth 56 6 10 G 25 Motor option: With lock Cable length 250 (146) 65 20 24 15 Lock cable Motor cable *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

CJ2

C73CZ 3mL C73CL NoneN C73CN Solid state switches marked with are manufactured upon receipt of order. 1.3-56 Direct Mount: Double Acting Single Rod Series CJ2R Specifications Square rod cover makes direct contact mounting possible.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port

VFR

Bottom ported: VV5FR2-01 Station 2Port size FD1 FU1 C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) For wiring specifications, refer to page 3-5-8. n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 3-5-21 22 Series VFR2000 Non

KJ

(inch) Applicable fitting size d (inch) Model L2 A M Min. port size Note) Weight (g) D L1 P Q 2-Applicable tubing 17 18 21 3 16 3 16 KQ2U07-99 KQ2U05-99 20.5 21.5 56 56.5 64.5 46 10.6 12 13.7 11.4 13.2 39.5 39.5 16.5 17 18.5 4.6 11.4 13.2 15.2 3.5 1 4 1 4 5 16 5 16 KQ2U09-99 24.5 15.2 6 Note) D: Max. diameter K M Applicable fitting H D Branch Y: KQ2U MS Applicable tubing O.D.

MXS Series Air Slide Table

KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5 100.5 150.5 M 49 54 65 83 101 151 ZZ 56 61 72 90 108 158 MXS8-10 MXS8-20 MXS8-30 MXS8-40 MXS8-50 MXS8-75 82.5 132.5 56 Air Slide Table MXS Series Dimensions MXS 8 With shock absorber (6) MXS8BS, BT, B 8 A 22 23.5 23.5 14.5 14.5

CQS

Example 7-4-5 6 Series CQS Weight/Without Auto Switch (g) For standard stroke Calculation: (Example) CQSD20-20DCM Cylinder weight: CQSB20-20D101 g Option weight: Rod end male thread 10 g : Rubber bumper 2 g : Double clevis style 92 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 12 29 36 42 49 56 63 93 100 113 147 180 107 16 38 47 56 64

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEJ LL LEL LEM FV M M FV LEY Included parts Flange Body mounting bolt FZ FX 4 x FD FT FT FZ FX 4 x FD LES LEPY LEPS Rod/Head Flange [mm] Size FD FT FV FX FZ LL M LER 25 5.5 8 48 56 65 6.5 34 32 5.5 8 54 62 72 10.5 40 63 9 9 80 92 108 28.4 60 LEH LEY -X5 Material: Carbon steel (Nickel plating) * The LL measurement is when the unit is in the Z-phase first detecting position.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

The number of pages has been increased from 24 to 56. ZV Edition B JSX U and JSXZ types have been added. The number of pages has been increased from 56 to 72. AX Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

10

41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CQS

66) Front flange (including bolt) 137 171 56 66 Rear flange (including bolt) 92 127 34 40 Double clevis (including pin, retainer, bolt) ( ): Long stroke model Note 1) Do not add value shown in the table above to long stroke models.

CY1

50 40 30 20 50 40 30 20 Model CY1H10 CY1H15 CY1H20 M2 2.5 16 16 M3 1.5 10 13 Model CY1H25 CY1HT25 CY1HT32 M2 26 85 96 M3 28 56 64 M1 1.5 10 13 M1 28 56 64 28 16 26 CY1H20 CY1H15 13 10 10 Moment Nm Moment Nm 2 3 4 5 22.5 3 4 5 CY1H10 M3 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s Static moment Moment generated

MNB

Upper limit of allowable value Solenoid valve for locking mounted on the unlocking port Maximum value of stopping position dispersion from 100 measurements Spring Lock Holding Power (Maximum Static Load) 32 40 50 63 80 100 Bore size (mm) 552 {56} 882 {90} 1370 {140} 2160 {220} 3430 {350} 5390 {550} Holding power N {kgf} 2 Series MNB Bracket Part Numbers Rod Boot 32 40 50 63 MNB-L 80 100 Bore

VQZ1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 9 10.5 10.5 58 30 (For C6, C8) (For C10) 10.5 17.5 95 (Single) 116.5 (Double) 300 130 (3 position) (Lead wire length) Cover diameter 1.6 Cross section 0.34 mm2 (For 02) 65 58 (12) 56 (26) 16.5 5 R1 P 1 R2 3 11.5 21 21 PE port 2-Rc 1/4 1(P) port (

VM

steel roller Hexagon nut thick 6, across flats 27 EXH port (3 port only) Panel mounting hole 3 port SA VA 0.5 MPa supply 3.5 mm P.T. 56 N F.O.F.