Table of Contents

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

SMC

3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11

5 Port Air Operated Valve

single 2 position double 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 02 03 04 VFA5244(-P) 02 03 04 VFA5144(-P) 36 (39.5) 27 (31) 36 (39.5) 27 (31) SYA 14 (15.5) 14 (15.5) SYJA 20.5 (24.5) 20.5 (24.5) VZA 92 (100) 1/8 [Pilot port: Lateral (-P)] 1/8 [Pilot port: Lateral (-P)] VFA VFA 82 (87) 51.5 (55.5) 82 (87) 5 (6.5) 51.5 (55.5) VFRA 2B 4A 2B 4A VPA4 42 (45) 52 (58

Compact

Origin Note 2) Origin Note 2) When LECP2 is used.

Integrated Controller

Rightward mounting A B C D E 16 30 to 100 21.5 46.5 33.5 34.5 (2) 2.9 105 to 300 41.5 53.5 25 30 to 100 27 62.5 39 50.5 (2) 4.2 105 to 400 52 64 32 30 to 100 30.5 65.5 42.5 53.5 (2) 4.9 105 to 500 60.5 72.5 The values in the table above are to be used as a reference when mounting auto switches for stroke end detection.

CE

1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

ZQ-OM01401

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

Air Cylinder Series MB

D-J5 D-F5 W D-J59W D-F5BAL D-F59F 110 115 120 95 90 (n4) 2 110 + 55 (n4) 2 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 130 + 55 90 + 55 95 + 55 n = 4,8,12,16... n (same side) n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... 1 90 110 115 120 95 130 140 120 125 130 2 (different side or same side) 105 100 (n4) 2 120 + 55 (n4) 2 (n4) 2 125 + 55 (n4) 2 130

CE

18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ M RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51

CE

-X 20Data P . 10-12-8 P . 10-12-30 P . 10-12-18 P . 10-12-27 10-12-1 2 Achieve rationalization of production lines with position feedback Stroke reading cylinder Measurement is possible throughout the full stroke range.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Qty. 1 1 2 2 2 2 4 2 !4 !

1

6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger than the odd number is to be used for the

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

CP95

7 to @0 and @2. Seal kits consist of items !

CP95

8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

CXWM/CXWL

Note 2) 2 magnets for auto switches are installed in the housing. 8-26-28 27 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 32 Basic Type: CXWM32Stroke/70 to 200 2-M14 x 1.5 Adjusting bolt 2 x 2-6.9 through 2 x 2-11 counterbore depth 6.5 2 positions for set screws 2 x 4-M6 x 1.0 through thread From the opposite side (8H7 hole pitch) for fixing adjusting bolts (M6) 2 x

SX

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted 32 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.