Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug w/o Connector, Surge Suppressor: None, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 110VAC 50/60HZ, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.6m, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 220VAC 50/60HZ, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Manually Operated, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: None, Manual Override: Manually Operated, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: Screwdriver Operated Style, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

VQ1000V-OMV0001

VVQ1000-51A-N7 5/16" VVQ1000-51A-N9 DIN DIN DIN DIN C S=5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000

Function: 3 (3 Position Closed Center), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector - Without Connector Cable), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket), CE Marked: Q (CE Marked)

Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector - Without Connector Cable), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5), Option: F (Bracket), CE Marked: Q (CE Marked)

Function: 3 Position Closed Center, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: M8 Connector - Without Connector Cable, Surge Suppressor: Surge Suppressor w/Light Non-polar, Manual Override: Non-locking Push Type, Port Size: Body Ported M3X0.5, Option: Bracket, CE Marked: CE Marked

Function: 2 Position Double, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: M8 Connector - Without Connector Cable, Surge Suppressor: Surge Suppressor w/Light Non-polar, Manual Override: Non-locking Push Type, Port Size: Body Ported M3X0.5, Option: Bracket, CE Marked: CE Marked

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector w/o Cable), Surge Suppressor: U (Light & Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, Port Size: C6 (ø6 One-touch Fitting), Thread: Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)

2

M Q Q Note) D is maximum diameter.

ZP

M-5AU-6 H H F Model A B C D2 E F G H Vacuum inlet direction q Pad dia.

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: M Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: M Thread, Rc, Option: Bracket, CE Compliant: CE Compliant

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: MN (M Plug Connector w/o Lead Wire), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Table of Contents

Grommet: G Conduit:C Q F D 300 280 D Q F C C G1/2 R R E E A H B B A H 2-P Port size 2-M Thread depth N 2-P Port size 2-M Thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L L K K DIN terminal:D Conduit terminal:T Cable 6 to 12 27.5 F F Q (Q) S 34 25 U