PSxx-OMH0002CN

()FSC SET 5R.D. 1 digit UP 1 UP 1 DOWN 1 DOWN 1 UP DOWN 1 SET 4 LoCUnL UP DOWN SET LoC SET 4 UnL -23No.PS-OMH0002CN-D 0 7F.S.0 (01 digit) UP DOWN 1 -24No.PS-OMH0002CN-D (2030) -25No.PS-OMH0002CN-D ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36

One-touch Fittings

Q1 O 2 x Applicable tubing L1 M A L2 L3 D H Connection thread Release button dimensions X Branch Male Elbow: KQ2LU-G (Sealant) Connection thread R Model H (Width across flats) Effective area [mm2] Min. port size Release button dimensions L1 L2 L3 A*2 M P O N Q1 Q2 Applicable tubing O.D.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

2, !3 and !

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

AS-FPQ/AS-FPG

2 O-ring NBR NBR !3 O-ring NBR NBR !4 Gasket NBR, Stainless steel 304 NBR, Stainless steel 304 !5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

VCL

H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.

IDG

With float type auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV

Series: 10, Voltage: 5 VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: Stainless Steel Body, FKM Seal, Class B Coil, CE Compliance: CE Marked

Series: 20, Voltage: 5 VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: Stainless Steel Body, FKM Seal, Class B Coil, CE Compliance: CE Marked

Series IDG

Note) Not applicable in case of standard dew points 20C (Nil) and 15C (symbol H). Note 2) Specifications with micro mist separator regulator are also available. See the order made section on page 35.

AS-FPQ/AS-FPG

1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

JXCx-OMT0028CN

OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address.6 FEh FFh 15bit 8bit 7bit 0bit (H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh 15bit 8bit 7bit 0bit (L) FF FE EE 90 h (L) 45 - 11.2 (IN Data)

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.