MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 Part no. Y-MU02 Y-MU03 Y-MU04 Y-MU05 Part no. I-MU02 I-MU03 I-MU04 I-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 MLGP RLQ Knuckle pin and snap ring are included.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

EX260 Integrated-type (For Output) Serial Transmission System Series 10-SV RoHS How to Order Manifold 10-SS5V 10S1 D N 05 1 U W NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

C95

200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

w e r t y u i o !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 08 C6 1 2 N M W 10 CE compliant CE compliant Nil Q Enclosure IP65 (Dust-tight, Water-jet-proof) 10 Clean series Note) For CE compliant models, DC-type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 08 C6 1 2 N M W 10 CE compliant CE compliant Nil Q Enclosure IP65 (Dust-tight, Water-jet-proof) 10 Clean series Note) For CE compliant models, DC-type only.

MB1

5 i q r y e @3@0 t!7@2!8wu!4!3 1 1MBK32 only A Rod sectional view A-A' A' !2!1 Parts list No. Description Material Note Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

0.4

2 i o q y !1 !5 !4 w !3 !0 r e u t 426 B Exploded View of Manifold Housing assembly and SI unit no. No. Manifold Part no.

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

VQ7-6/7-8

Other Nil 1 2 3 4 9 ... ... 10 10 stations Note) When equipped with control unit, 1 or 2 stations are used for mounting.

ZQ

Table (1) Combination of solenoid valve, pilot valve and power supply voltage Applicable power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How

ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

XLAQ/XLDQ

part Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C None w, e, r, t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

MU

NX NL R1 NO NX NZ R1 Allowable Rotating Torque (Nm) 25 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CD-MU02 CD-MU03 CD-MU04 CD-MU05 8 10 10 14 8.5 10 11 16 11 14 15 20 3 4 5 6 13 14 17 23 8.5 10 11 16 19.5 24 26 36 9 11 13 16 8 10 10 16 21 24 27 39 9 11 13 16 18 22 26 32 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 32 40 50 63 Size Allowable rotating torque Work mounting allowable torque

Bernoulli Gripper

4 e r t y u q With stoppers i u w 30 40 Basic type With vibration suppression cover: Resin u t y r u q With stoppers i !0 w e 40, 60 20, 30, 40, 60, 80 Basic type With vibration suppression cover: Stainless steel q u t y r With stoppers o i w e u !0 !1 9 Bernoulli Gripper ZNC Series 80 Basic type e !2 q u t y With stoppers o i r w e Component Parts No.