OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

CC

Move the piston to the stroke end of the side that will be filled with oil, and perform steps q through r in the same sequence as described above. MK/MK2 Environment UAvoid use near fire. UDon't use in the clean room. RSQ/RSG Mounting RSH UInstall the converter vertically. UInstall the converter at a position that is higher than the cylinder.

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5E (Tube O.D. 3/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: R, Rc, Packaging: 1 (Standard Packaging Equivalent to Class

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 4B (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: Connector, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 1/4", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5

Fitting Type: Elbow, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 3/8", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5

Fitting Type: Elbow, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 3/4", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5

V

D E R (N)VM400 A C T U AT O R O N LY P A R T N O.

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4

VQ5000

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

VQZ1000/2000/3000

(A) AC circuit DC circuit 1 2 1 2 (B) NL: Neon light R: Resister LED: Emitting diode R: Resister Valve Mounting NL R R LED After confirming the gasket is correctly placed under the valve, securely tighten the bolts with the proper torque shown in the table below.

VQ4000

(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.