Model: 7 (VP700), Body: 44 (Base Mounted), Pilot: Internal Pilot, Valve Electrical Entry: Y (DIN Terminal w/Connector, w/Pitch 8mm Standard), Port: 04 (1/2, VP700), Thread: Rc, Bracket: M, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: 7 (VP700), Body: 44 (Base Mounted), Pilot: Internal Pilot, Valve Electrical Entry: Y (DIN Terminal w/Connector, w/Pitch 8mm Standard), Port: 04 (1/2, VP700), Thread: N (NPT), Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: 7 (VP700), Pilot: Internal Pilot, Valve Electrical Entry: Y (DIN Terminal w/Connector, w/Pitch 8mm Standard), Port: 04 (1/2, VP700), Thread: N (NPT), Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: 7 (VP700), Pilot: Internal Pilot, Valve Electrical Entry: Y (DIN Terminal w/Connector, w/Pitch 8mm Standard), Port: 04 (1/2, VP700), Thread: Rc, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Model: VP700, Pilot: Internal Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 8mm Standard, Port: 1/2, VP700, Thread: NPT, Switch Electrical Entry: M12 Connector, OMRON, Check Valve, External Pilot Only: None

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Model: VP700, Body: Body Ported, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 1/2, VP700, Thread: G, Bracket: None, Switch Electrical Entry: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: None

Model: 7 (VP700), Body: 42 (Body Ported), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 04 (1/2, VP700), Thread: F (G), Bracket: None, Switch Electrical Entry: S1 (M12 Connector, Rockwell Automation), Check Valve, External Pilot Only: None

Model: 7 (VP700), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 04 (1/2, VP700), Thread: F (G), Switch Electrical Entry: S1 (M12 Connector, Rockwell Automation), Check Valve, External Pilot Only: None

Model: VP700, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 1/2, VP700, Thread: G, Switch Electrical Entry: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: None

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Table of Contents

S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Table of Contents

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1

ZX

flow rate adjusting needle (PE port) Interface plate 63.5 18 4 15.5 2-3.3 Mounting hole M5 (or M6) (V port) Vacuum pad connection port M5 (or M6) (PV port) Air supply pressure port Bracket A (Standard accessory) Note) Dimensions : For mounting bracket A : For mounting spacer 1. 13-2-26 26 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S1