SZ3000 Note Description C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 L6: With One-touch fitting for 6 (Elbow fetching upward) L8: With One-touch fitting for 8 (Elbow fetching upward) B6: With One-touch fitting for 6 (Elbow fetching downward) B8: With One-touch fitting for 8 (Elbow fetching downward) q SUP/EXH block assembly SZ3000-50-1Aw e r t y u SZ3000-53-5A SX3000-113-1 SZ3000
Note Description C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 L6: With One-touch fitting for 6 (Elbow fetching upward) L8: With One-touch fitting for 8 (Elbow fetching upward) B6: With One-touch fitting for 6 (Elbow fetching downward) B8: With One-touch fitting for 8 (Elbow fetching downward) q SUP/EXH block assembly SZ3000-50-1Aw e r t y u SZ3000-53-5A SX3000-113-1 SZ3000
Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate Flow rate by size l/min (ANR) Standard dew point C Symbol Drain discharge method (Mist separator, Micro mist separator, Micro mist separator with pre-filter ) 10 100/25 20 200/50 30 300/75 50 60 3 25/6 25/3 75 100 5 50/12 50/6 20 15 500/125 600/125 750/150 1000/190 Nil H L Size and standard dew point
With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9 43.5 10 40 5 to 50 31 25 37.5 31.5 13 14 47 6 M8 x 1.25 60 3.5 12 6 37 4.5 11 50.5 10 6 JCQ Series
6!7 i q @0 w y @1!8t @2 q !1 !0!3 o r !4 !5 !9u !2 CHM CHS CH2 CHA CHA @0 Related Products D40 Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.
Rc 3/8 Rc 1/2 VBA2100-03 VBA4100-04 20 14-9-6 7 Booster Regulator Series VBA1110 to 4200 Air Operated Type VBA2200-03, VBA4200-04 I Pressure gauge (Option) Pilot port IN port F.R.L.
2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !
:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?
:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?
(4) 2.9 14.5 psi (0.1 MPa) (20) 0.07 (2) 0 0 0 0.07 (2) 0.14 (4) 0.21 (6) 0.28 (8) 0 4 2 8 6 10 Suction flow SCFM (L/min (ANR)) Needle opening [rotations] The actual suction flow at the point of suction varies depending on the vacuum pumps piping conditions.
*1 Values obtained from Correction Factors on page 6. 3 Check the coefficient.
7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.
4, 6 S Y M B O L S Primary pressure Bar Flow ln/min H O W T O O R D E R M I N I AT U R E R E G U L AT O R (N)ARJ1020F (N)ARJ1020F M5 D I M E N S I O N S S E R I E S NARJ 04 4mm 06 6mm Japanese N North American M5 M5X0.8 Panel Mount Dimension Model A B C D E F G H J NARJ1020F-M5-04 21 10.4 4 M5X0.8 6 10.6 3.5 15.5 50 NARJ1020F-M5-06 22 12.8 6 Courtesy of Steven Engineering, Inc. !
[660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate
Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C
Valve model Port size VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 4.5-5 Series VCW Dimensions
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
(For manifold) 0: Plug-in sub-plate 04 Rc 1/2 Porting specifications Note) For thread standard, refer to page 2-6-39.
Operating Range (mm) Auto switch model Bore size 20 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 5.5 6.5 6 6.5 6 7 7.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-F7BA/F7BAV D-F79F/J79W/F7NT 5.5 6 5.5 6 6.5 6.5 6.5 D-A9/A9V D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W 9 9 9 8.5 10.5 10 10.5 11.5 11.5 11.5 11.5 13.5 12.5 14 15 15 15 15 17 16 17.5 Since this is a guideline including hysteresis, not meant
Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (