Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(Refer to the table below) U D U D Cylinder port size Kit designation/Electrical entry/Cable length 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM F L Kit (D sub connector kit) Kit (Lead wire kit) Note) Indicate on a manifold specification sheet in case of mixed sizes.

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

side D side 3 m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C8: 8 One-touch fittings Manifold base (8 stations) 10-SS5Q23-08FD2-D F kit (D-sub connector kit) 10-SS5Q23-08FD2-D 1 set (F kit 8-station manifold base) 10-SQ2131-51-C8 3 sets (2 position single) 10-SQ2231D-51-C8 3 sets (2 position double) 10-SQ2331-51-C8 1 set (3 position closed center) SSQ2000-10A-3 1

CJ5-S

0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless

CJ5-S

A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke

Direct Solenoid

{Xl "xx" D srrd6 **n6rynsbi. or lpodsdd dsw rndfu dr.nd rd onnos drar6 *r8d.sirt1@/110v $tts Edr&d -a c.2dt20v 50 ti.d262.0v @ rt sor.,Frd@asb{ iiclur,.6 6p, i1) F.I'b.t aEsptus dBi.ir13. ( )&..1 13, ialhd 1q e) v.tTG'cF &r.dd.!p.ssbly irclud dp, (1) FG..d non.bd{iga.Brd r,rrl 14, o) d.rul 15 (2}doial 1?, VdEIwO' 6.r.rid.-+.smbry iEru

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

LECP6_C

+ + + + 8 I/O (NPN/PNP) 9 10 FG () 12 - 3.3. 1 LECP6 2 DIN LECP6D 13 - 3.4. 1 DIN 2 LECP6DINLECP6DDIN 2M4 DIN DIN A DIN ADIN 2 M4 M4 14 - D (100 ) 2mm 2 D 3 40 30mm 50mm ()60mm () 0mm (LE)10mm LEH 25 30mm 60mm 30mm 50mm DIN ) 15 - 4.

PF-OMM0004_C

-2No.PF-OMM0004-D / 1 1.5 3 3) 1 1 () [] -3No.PF-OMM0004-D () () () () -4No.PF-OMM0004-D () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 () 0~90 3mPas3cP () <> -5No.PF-OMM0004-D * 16 FG (49N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMM0004-D * () 6 33 () () 10 m DC(-)() -7No.PF-OMM0004-D * () () CE -8No.PF-OMM0004-D * 3 2459 LCD * -9No.PF-OMM0004-D * , *

PSxx-OMU0008CN

Rc1/8 M50.8 5 G1/4 A2L B2L URJ1/4 TSJ1/4 -82No.PS-OMU0008CN-D A -83No.PS-OMU0008CN-D C -84No.PS-OMU0008CN-D () 43.602 0.5~7 ()+ 43.602 0.5~7 -85No.PS-OMU0008CN-D () 1~5 -86No.PS-OMU0008CN-D ()+ 1~5 -87No.PS-OMU0008CN-D () 2 (n ) <> 31n +3.5n -1 -88No.PS-OMU0008CN-D <> -89No.PS-OMU0008CN-D () 2 (n ) <> 36n +4n -1 -90No.PS-OMU0008CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021

LECA6_C

7 + + + + + + 8 I/O (NPN/PNP) 9 10 FG () 12 - 3.3. 1LECA6 2DIN LECA6D 13 - 3.4. 1 DIN 2 LECA6 DINLECA6D DIN 2M4 DIN DIN A DIN ADIN 2 M4 M4 14 - D (100 ) 2mm 2 D 3 40 30mm 50mm ()60mm 0mm (LE)10mm 25 LEH () 30mm 60mm 30mm 50mm DIN ) 15 - 4.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

PS-OMH0005CN

2 / / / 2 n_n / LoC() 4 UnL LoC 4 LoC UnL 5F.S.(2.5F.S.) 1 12341 2 2 2 -27No.PS-OMH0005CN-D (2030 ) -28No.PS-OMH0005CN-D PSE200 ( ) 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 OFF 6 -29No.PS-OMH0005CN-D 7 Yes No 8 8 9 10 11 12 13 14 15 16 -30No.PS-OMH0005CN-D No.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

PFxx-OMJ0005CN

() Rc Rc NPT 1/8 NPT 1/4 G G 6 1/4 (5/32") (5/16") 1/8 1/4 1/8 1/4 95 g 125 g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--

PSxx-OMH0002CN

()FSC SET 5R.D. 1 digit UP 1 UP 1 DOWN 1 DOWN 1 UP DOWN 1 SET 4 LoCUnL UP DOWN SET LoC SET 4 UnL -23No.PS-OMH0002CN-D 0 7F.S.0 (01 digit) UP DOWN 1 -24No.PS-OMH0002CN-D (2030) -25No.PS-OMH0002CN-D ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

KE AS-FG Dimensions AS-FP H1 AS-FM (Hexagon width across flats) AS-D Applicable tubing O.D. d AS-T H2 ASP (Hexagon width across flats) L4 L3 ASN L5 AQ ASV D1 L2 AK VCHC M M L1 ASR ASQ Metric Size Inch Size L4 Max. L5 (1) L5 (1) L4 Max. Weight (g) Weight (g) Panel-cut dimensions Panel-cut dimensions H1 H2 d D1 L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M Model Model Min. Max. 34.4 Min.