Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S
Hysteresis (3 digits) OFF ON point = C, C1 OFF point = C-3 digits, C1-3 digits (1 digit is the minimum setting unit.) Other Functions Key lock mode Used to avoid a malfunction when buttons on the front part of the switch are pressed. Initiate key lock Release key lock SET SET Press the SET button to complete the setting. Press the SET button to complete the setting.
With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no. (station 3) P P N.C.
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Emitter Cartridge Type: D (High Speed Static Neutralization Cartridge), High Voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Power Supply Cable Direction, Length: M (Entry Direction: Straight, Length: 10 m), Communication Cable Entry: M (Entry Direction: Straight, Length: 10 m), Nozzle Bracket: F (Angle Adjustment Bracket), DIN Rail Mounting Bracket: U (Controller: Included
Controller: 6H (Parallel I/O, PNP), Mounting: 8 (DIN Rail), I/O Cable Length: None, Actuator: LEFS, Accuracy: Basic, Body Size: 32, Motor Mounting: In-line, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 700mm
Emitter Cartridge: D (High Speed Static Neutralization Cartridge), High Voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Nozzle Bracket: B (L-bracket)
Model: 40 (Standard, AC Type), Bar Length: 46 (460mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Bar Bracket: B (w/Bracket 1)
Model: 41 (AC), Bar Length: 40 (400mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage
Model: 41 (AC), Bar Length: 112 (1120mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage Power
Model: 42 (Dual AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
Model: 42 (Dual AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
Model: 42 (Dual AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: E (High Speed De-ionizing Cartridge, Silicon), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1)
Model: 42 (Dual AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: E (High Speed De-ionizing Cartridge, Silicon), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller
Model: 40 (Standard), Bar Length: 46 (460mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 10 (10m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 1 (1m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller
Model: 42 (Dual AC), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1)
Model: 42 (Dual AC), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage Power