Series IDG

to Order F = (C x 1.8) + 32 1l/min = 0.0353SCFM IDG 30 M 03 Optional specifications Size Symbol Contents Size 3 3 5 10 20 30 50 60 75 100 5 Standard Nil 10 With fitting for purge air discharge 20 30 50 60 75 P Note 2) Note 1) Note 2) Note 2) Note 2) Flow direction (rightleft) R S Standard equipment With dew point indicator In case of two or more options, indicate them in an alphabetical

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

58

Reed switch 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) 3-wire IC circuit Terminal conduit 5 V, 12 V 12 V Relay, PLC Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 24 V 12 V Grommet IC circuit 5 V, 12 V Water resistant (2-color indication) IC circuit 12 V 5 V, 12 V Diagnostic indication (2-color indication) A96

HRX-OM-X037

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-3 2.2.1 HRL-A-40 (Air-cooled type) . 2-3 2.2.1 HRL-W-40 (Water-cooled type) . 2-3 2.3 Function of Parts . 2-5 Chapter

Intrinsically Safe Valve

(PA/B) 4/25/3 (A/BEA/EB) Valve model (P, EA, EB) 4, 2 (A, B) 1, 5, 3 4position dual 3 port Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] N.C.

REA/REB

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Direct Operated

x E Mounting hole Port indication 2 x Rc1/4 Y 44 T Q G1/2 3 1 A A C D B B L L2 L 12 L1 U M D side Stations n U side 1 2 3 4 5 300 280 X V R S 2 x E Mounting hole H L K J L (mm) n (stations) Model Dimension 3 168 156 218 200 4 204 192 264 246 5 240 228 310 292 6 276 264 356 338 7 8 348 336 448 430 9 384 372 494 476 10 2 L1 L2 L1 L2 96 84 126 108 132 120 172 154 312 300 402 384 VVX31 VVX32

Series VQ Metal Seal/Rubber Seal Body Ported

M5 thread Coil voltage VQ0 2 position single Note) See Options" on p.1.10-67 for inch size One-touch fittings. 1 2 3 4 5 6 100V AC (50/60Hz) G: Grommet C kit single only.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

CG5-S

0.7 C type 5 C type 5 Double knuckle joint Mounting nut Rod end nut Knuckle pin and snap ring are packed together. d d MM ND hole H10 Shaft d9 L RR1 C C +0.2 0 NX +0.2 0 U1 A1 L1 12 7 B H B H Material: SUS304 Material: SUS304 Material: SUS304 Part no.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

I/O Configurator (NFC version)

The Remote cannot be reset when the power supply is not connected. (5) Confirm that the radio button "Pairing mode" is checked. (4) (3) (5) Pairing check window (Wireless Remote (1)) -87No.EX-OMV0017-C STEP 5 Change of parameter setting (Wireless Remote (2)) (1) Hold the NFC reader/writer over the Wireless Remote (2).

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

JXCx-OMU0026

JXC-OMU0026 12.5 Actuator cable [For sensor/ with lock (5m or less)] (a) (b) L E C P B Signal name Terminal Cable color Terminal number number Brown 2 A B-1 Red 1 A-1 Cable length [L] Orange 6 B B-2 Yellow 5 B A-2 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 (c) 5 5m Shield Cable color Terminal number Brown 12 Vcc B-4 Black 13 GND A-4 Red 7 A B-5 Cable type Black 6 A A-5 Orange 9 B

Vacuum System Peripherals:

(Except VEX 3 series) 1) Leakage 1 cm3/min or less 2) Leakage 105 atmcc/sec or less 3) Applications are different from vacuum holding valve. 4) Refer to Best Pneumatics Vol. 1/2/3/4/5 for flow characteristics. 5) Conversion from sonic conductance C: Effective area S = 5.0 x C ZX Note 3) ZR Circuit construction Blanking ZM ZH Best Pneumatics volume no. Standard External pilot spec.

SYJ300/500/700

10-SYJ300 Type 20 manifold: Top ported / 10-SS3YJ3-20Station -00 (-F) [ ]: AC Grommet (G) 3.5 L2 (6) (2.3) (17.5) 10 (21.7) M3 x 0.5 (Bracket mounting screw) 2-3.5 (For mounting) (Pitch) P = 10.5 12.5 41.5 M3 x 0.5 (A port) 5 5 2 1.9 10 5 10 5 12.7 R P P 26.4 21 25 48.6[50.8] R A A A A A 2-3.5 (For mounting) M5 x 0.8 (P, R port) Manual override Approx. 300 (Lead wire length) L2 3.5 L1 (

JIS Standard Hydraulic Cylinder

Refer to Best Pneumatics No. 2-1 for details. 361 CH2E/CH2F/CH2G/CH2H Series Construction @7 q y i @8 !4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

90

PS and PD port dimensions 1,4 Common supply (PV) port 1 Metric size: 2 x 8 D Inch size: 2 x 5/16" 2 x Common supply (PD) port 4 62 53 37.4 C 38 8.4 B 26.4 2 x Common exhaust (EXH) port 2 3.5 n x Individual exhaust (EXH) port 3 10.5 n x Vacuum (V) port (Built-in suction filter) (n1) x 15 15 33 (mm) Number of stations Hexagon width across flats B A D C Port type 1 2 3 4 5 6 7 8 9 10 06 08

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX21 0 1 2 3 VX021N-12A Dimensions page 22 (Single unit) VX22 0 2 3 4 VX23 0 2 3 4 VX022N-12A VX22 0 5 6 VX23 0 5 6 VX023N-12A-L 4 5 Series VX21/22/23 For Water /Manifold Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

modular-press-e

A C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C AD27-C Polycarbonate C2SF-J