ASD

T Metric L4 L5 A1 A2 M MAX.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The flow switch is comformed to CE mark. 21 Series PF2W For Water Digital Flow Switch How to Order PF2W5 20 03 T Remote Type Display Unit Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Output specification Nil 1 2 Output for display unit Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) T Temperature range 0 to

Digital Flow Switches

Note 6) The flow switch is comformed to CE mark. 21 Series PF2W For Water Digital Flow Switch How to Order PF2W5 20 03 T Remote Type Display Unit Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Output specification Nil 1 2 Output for display unit Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) T Temperature range 0 to

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

IR1000/2000/3000

B410T B310T B210T t Interface Y40 Y30 Y20 G y Interface with L-bracket (e + t) Y40L Y30L Y20L u Interface with T-bracket (r + t) Y40T Y30T Y20T PPA AL tInterface 97.5 133 172 eL-bracket rT-bracket 135 qAF2000 IR1000 wAFM2000 178 qAF3000 IR2000 wAFM3000 234 qAF4000 IR3000 wAFM4000 Accessory (Option)/Part No.



Nil F N T Rc G NPT NPTF 2. Install the orifice facing in the opposite direction (external pilot). Install it carefully to prevent damage to the O-ring.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) r w w q t r e y q t A A B B SY SYJ i i SX R1 P R2 R1 P R2 VK 3 position closed center/exhaust center/pressure center u VZ 3 position closed center (A) 4 (B) 2 VF t q r w 5 (R1) 3 (R2) 1 (P) VFR 3 position exhaust center (A) 4 (B) 2 A B VP7 5 (R1) 3 (R2) 1 (P) VP4

VXZ

Series VXZ22/23 How to Order Model Port size (Rc 1/4) (Rc 3/8) (Rc 1/2) (Rc 3/4) (Rc 1) 02 03 04 06 10 2230 2230 2240 2350 2360 Electrical option Nil None With surge voltage suppressor With indicator light With light/surge voltage suppressor Thread type S Nil Rc L T NPTF F G Z N NPT Refer to the table (1) given below for availability. VXZ 2230 02 1 G N.C.

99

Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

7

A b a IN OUT 3 A VXD2 Port size 04 (1/2) (With bracket) M B 2 x P Port size I F L K J (D) e d 1.6 f IN OUT a b 18 f Conduit terminal e d 2 x P Port size E (U2) (V2) 34 32 T 3 A VXD2 C F 25 3 A Note) Only the VXD2 with port size of 04 (1/2) has threads on the bottom of the body.

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

VSA4

VSA4230-02 VSA4230-03 VSA4230-04 VSA4330-02 VSA4330-03 VSA4330-04 VSA4430-02 VSA4430-03 VSA4430-04 2 position single VA 3 8 1 8 Rc 0.75 1 8 Rc 1 8 Rc SA 2 position double 3 8 1 8 Rc 0.86 1 8 Rc VA 1 8 Rc 3 position closed center 3 8 1 8 Rc 0.90 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

PF-OMN0009_C

81 50 PF3W520--T 89 54 PF3W540--T 109 71 PF3W511--T 135 92 PF3W521--T 115 74 PF3W521-F12-T 119 76 PF3W521-F14-T 123 78 -43No.PF-OMN0009CN-F PF3W504/520/540/() A AA B D F K L N P Q Q PF3W504S 104 50 63.6(Max. 68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W520S 112 54 63.6(Max. 68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W540S 142 71 75.25(Max. 81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W504S

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

02 03 Port thread Nil T F Rc NPTF G Size 1 2 3 Size 1 Size 2 Size 3 Location of P, EA, EB port Number of stations D U Bottom Top 1 1 station 10 10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom 3/8 Bottom 1/2 Option

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Applicable tubing O.D. d Weight (g) Model T L4 L3 D3 AS231F-U01-23 AS231F-U01-04 AS231F-U01-06 AS231F-U01-08 AS231F-U02-04 AS231F-U02-06 AS231F-U02-08 AS231F-U02-10 AS331F-U02-06 AS331F-U02-08 AS331F-U02-10 AS331F-U02-12 AS331F-U03-06 AS331F-U03-08 AS331F-U03-10 AS331F-U03-12 AS431F-U04-10 AS431F-U04-12 7.8 8.9 11.0 15.2 8.9 11.0 15.2 18.5 11.0 15.2 18.5 20.9 11.0 15.2 18.5 20.9 18.5 20.9

Vacuum Unit

is N r Rated voltage (Supply valve/Release valve) C1 V None None Cannot be selected when t is P or T Symbol Voltage 5 24 VDC 6 12 VDC L None V V Cannot be selected when t is N L1 None None V L2 None V None Cannot be selected when t is P or T L3 None None None 4 For the connector length other than 300 mm, order the connector assembly on page 32 separately. t Pressure switch for vacuum/Pressure

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !