Vacuum Pad

Chart 1.

Vacuum Pad

Chart 1.

Vacuum Pad

Chart 1.

Vacuum Pad

Chart 1.

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

AC Servo Motor Driver (SSCNET Type)

1) (Note 1) 31 Overspeed 32 Overcurrent Alarms 33 Overvoltage 34 Receive error 1 (Note 2) 35 Command frequency error 36 Receive error 2 37 Parameter error 45 Main circuit device overheat (Note 1) (Note 1) (Note 1) 46 Servo motor overheat (Note 1) (Note 1) (Note 1) 47 Cooling fan error 50 Overload 1 (Note 1) (Note 1) (Note 1) 51 Overload 2 (Note 1) (Note 1) (Note 1) 52 Error excessive 8A USB

air-filter-e

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Air Preparation Equipment

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Multi-channel Digital Sensor Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

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Digital Gap Checker ( compatible)

Bit offset Item Notes 0 Distance detection SW1 0: OFF 1: ON 1 Distance detection SW2 0: OFF 1: ON 2 SUP port pressure SW1 0: OFF 1: ON 3 SUP port pressure SW2 0: OFF 1: ON 4 OUT port pressure SW1 0: OFF 1: ON 5 OUT port pressure SW2 0: OFF 1: ON 8 Pressure diagnostics 0: Normal 1: Abnormal 15 Error diagnostics 0: Normal 1: Abnormal 16 to 31 OUT port pressure gauge measurement value 16 bit

S Couplers Series KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

Compact Manifold Regulator

t y u A B N 1.

Industrial Filters

560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

Digital Flow Switch ( compatible)

(page 87) 2030 0x07EE 0 R/W Cut (Zero cut-off setting) U8 1 Y Setting range 0 to 10 1.0% increments 0: oFF 1: rAC 2040 0x07F8 0 R/W inP (External input setting) U8 1 Y (Accumulated value reset) 2: rPb (Reset peak/bottom) 2100 0x0834 0 R/W AoUt (Setting of analogue output) U8 0 Y 0: 1-5 (1 to 5 V) 1: 0-10 (0 to 10 V) Setting of analogue output (Voltage output type only) 1 R/W FrEE (Analogue

EXxx-OMN0027CN

0 0 1 Bit No. 05 09h(9 ) 6 (1) 7 (0) 07 7 6 5 4 3 2 1 0 Byte 20 Bit No. 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 89 7 6 5 4 3 2 1 0 Byte 21 Bit No. 0 18 1 19 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -75No.EX-OMN0027CN-D 3 12 1 7 6 5 4 3 2 1 0 Byte28 1 0 A Byte29 A Byte30 A 7 6 5 4 3 2 1 0 Byte61 1 0 L Byte62 L Byte63 L Bit No. 04 09 5 Reserved 6 (