HRX-OM-Q026 Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)
a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP
o o E 0 0 : fr I 0 0 5 o 3 o 0 4 I 4 0 0 3 E oo, o !
NCMB 075-0400-XB7 ---E-Low tgmperatule Alto-switch capable not avaitable. (E Series NCM Piwt Bracket Rear Pivot Mount NCMC NC$-PCo75 31".%'..1%a".11/i' Pirsot Bracket (End Mount NCME) Series NCM Foot Bracket Rod Cleuis Jam Nut noart,reaat World Wide QS\E Support... North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc.
e. f. -37- 6.5 (LEFBLEFS -(A) (-(B)) A B LEF16 M2.5x5 LEF16 M2.5x16 LEF25 M3x6 LEF25 M3x20 LEF32 M3x6 LEF32 M4x30 LEFS40 M3x6 LEFS40 M4x35 -38- 7. No. 1) 1 / /P30 4.
ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.
When error occurs Precautions W hen an e rror occurs,take the following steps. The tenSile strength of the cord is 49N (Skgf). Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.
Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .
Other items in the step data should be input beforehand using the controller setting kit (LEC-W2) and teaching box (LEC-T1). 17 No.JXC-OMW1019-A 8. Wiring of cables / Common precautions Warning (1) Adjusting, mounting or wiring change should never be done before shutting off the power supply to the product.
Description Material Note q Electroless nickel plated Brass Body B w Electroless nickel plated Brass Body A e Electroless nickel plated Brass Needle r Electroless nickel plated Brass Lock nut t Electroless nickel plated Brass Handle y HNBR U seal u Electroless nickel plated Brass Needle guide i NBR O-ring o NBR O-ring !0 Chromium bearing steel Steel ball !
Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)
: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)