LEF-OM006xx

e. f. -37- 6.5 (LEFBLEFS -(A) (-(B)) A B LEF16 M2.5x5 LEF16 M2.5x16 LEF25 M3x6 LEF25 M3x20 LEF32 M3x6 LEF32 M4x30 LEFS40 M3x6 LEFS40 M4x35 -38- 7. No. 1) 1 / /P30 4.

PSE540/560

ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

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When error occurs Precautions W hen an e rror occurs,take the following steps. The tenSile strength of the cord is 49N (Skgf). Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.

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Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Other items in the step data should be input beforehand using the controller setting kit (LEC-W2) and teaching box (LEC-T1). 17 No.JXC-OMW1019-A 8. Wiring of cables / Common precautions Warning (1) Adjusting, mounting or wiring change should never be done before shutting off the power supply to the product.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Electroless nickel plated Brass Body B w Electroless nickel plated Brass Body A e Electroless nickel plated Brass Needle r Electroless nickel plated Brass Lock nut t Electroless nickel plated Brass Handle y HNBR U seal u Electroless nickel plated Brass Needle guide i NBR O-ring o NBR O-ring !0 Chromium bearing steel Steel ball !

: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)

Sensor: T1 (-100 to 100 KPa), Option: E (Vacuum Break Flow Adjusting Needle Screwdriver Operation Type Long Lock Nut)