Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

90

r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole

ZSE2/ISE2

: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

Smooth Cylinder/Low Speed Cylinder

Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tube side Rc 1/8 Air flow (L/min (ANR)) 38 7 12 REA Controlled flow Effective area (mm2) 0.6 0.1 0.2 Flow rate (L/min (ANR)) 420 105 280 REB Free flow Effective area (mm2) 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C REC Dual Type CY Air Flow/Effective Area CX CX ASD230FM-M5 ASD330FM-01 ASD430FM

LEC-OM02904

PC05 **COP2 C-2 0h 0 0 0 0 1 0 1: PC06 *COP3 C-3 0h No.PC01 0 0 0 01 [rev] 10.1 [rev] 20.01 [rev] 30.001[rev] 01 [rev] 10.1 [rev] 20.01 [rev] 30.001[rev] B1 MR Configurator2 TM PC07 ZSP (ZSP) (ZSP)20r/min(3.5(2)(b)) 50 r/min 0 10 PC08 0 PC09 MOD1 1 0h 1(M01)(5.3.3) 0 0 0 +8V/400V 1MO1 1(MO1) 8V/ 0 (8V/) 8V/ 1 (8V/) +8V/ +8V/ 2 (8V/) 3 (8V/) 8V/ 4 (8V/) 5 6 (10V/100pulse) 8V/ 10V/

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

-fl Seies

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!3a r-l 3.do.s {l-^:!l.3i? Lr 3'',"*1fl:!!J1?r-, tL-!.Q!Ls r+r i coM 5 l+l (rld,\ ) , gr1f-.!9!"Bsr I l l c o M . I r + ) i (L.-,{+) i ,.-jq35' ) ,**'il-ffi:l;t I F * 5 | | --:a I ,r.t!!-asl |r,Ftn-i '**tb#";1.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

•

Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Tighening torque of 0.3 to 0.4 Nm) VZS A VFS Circuit with light VS AC circuit DC circuit VS7 1 2 1 2 NL: Neon light R: Resiser LED: Emitting diode R: resister NL R R LED Valve Mounting B Fitting and Silencer Part No. for P, R Ports When Using Valve as an Individual Unit After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Control type 04 06 4 6 Port size 0 1 Meter-out Meter-in M3 M5 01 02 M3 x 0.5 M5 x 0.8 R 1/8 R 1/4 With One-touch fitting Fixed orifice Applicable model AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS221F-01-04 AS221F-01-06 AS221F-02-06 Symbol Fixed orifice 1 2 3 4 5 6 7 8 9 10 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 The graph below shows the relationship between orifices for each cylinder bore