Aluminum High Vacuum Angle Valve Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.
Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit (Circular connector) T kit (Terminal block box) S kit (
B Counter bore depth C CB HA 2-P (piping port) 4-J x E (depth) HT 2 x 4-MM thread depth M T T Y HP L TC F X WP GW QW PW GP D 4-LD W K WS With switch rail Plug HS G Q + Stroke CR HR Z + Stroke (Area E) for CY1RG25, 32, 40, 50, 63 2-P (piping port) 22 8 14 12.5 19.5 13 30 Plug 2-P (piping port) 12.5 CY1RG10 CY1RG15 (mm) CB CR B C D G GP GW H HA HB HC HP HR HS HT J x E K F Model CY1RG10 2 0.5
Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting)
I . n a n . , a d r b e . r d I p o a l ' o n U 1 r s ? H S y \ l , , , " . , . b " . , , | , a I r ," 01 S l\(SreeT ,16 .'p . I o*rir;_ rri,-"*,rt"sLe t ,o o,r. rr I ' | ' ' " aP, !q!Icgtqar ol s-trNK E port position n . s tn: f r, r!l'lr!rFd '.lFr vr L l E eclric Co Ltd.: TLnkMn Not.2)Spec lisd ayoul: nd cate 0r r !
Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K XA1 to XA24 S,W Shaft pattern sequencing I XA31 to XA59 XC7 X,Y,Z,T,J,K Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" XC12 to XC15 Size Standard weight 90 180 S,W,Y Change of angle adjustable range (90 to
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
For details, refer to Specific Product Precautions on page 196. 2 Not available for 6 Rubber Stopper Model MXQ8C MXQ12C Max. absorbed energy [J] 0.06 0.12 Mounting screw size [mm] M6 x 0.75 M8 x 1 Shock Absorber/RJ Model MXQ8C MXQ12C Max. absorbed energy [J] 0.35 0.5 Stroke absorption [mm] 3 5 Collision speed [mm/s] 50 to 500 50 to 500 Max. operating frequency [cycle/min] 80 80 Max. allowable
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port
keeper plate mounting screw J P H A B C D d K L L1 E Part no.
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6
CL CL1 EB EA D e MLGC Width across flats B1 CNG l h + l S + Stroke ZZ + Stroke MNB ZZ + l + Stroke CNA 125 to 160 CNS CLS With rod boot A Rc BP lock-up port Unlocked when pressurized CLQ GC B Rc BP lock-up port 4-FD 4-J 2-Rc P MLGP RLQ BF e MLU ML1C Plug cap 2 positions l h + l ZZ + l + Stroke S + Stroke ZZ + Stroke D-X 20Data Stroke range (mm) Bore size (mm) A AL B B1 BF BX BY C D BP
250-S (Refer to page 44 for both ends tapped and male thread dimensions.) 150 (1-1/2"), 200 (2"), 250 (2-1/2") P-port H-thread C-depth 4 places N-through hole Z Q J M2 bolt circle W M1 E I dia.
lor 9~re lock-<J GC GD ~ {o r> tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10
x 1.25 15 34.5 M26 x 1.5 1/8 26 0 0.039 40 50 11 16 14 15 38 39 24 10 7 11 18 21 22 8 46.5 M14 x 1.5 21.5 42.5 M32 x 2 1/4 32 Dimensions by Stroke Built-in One-touch Fittings 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Stroke Q P Symbol ZZ Z S ZZ Z S ZZ Z S ZZ Z S ZZ Z S Bore size (mm) 20 20 217 208 137 192 183 112 167 158 87 21.5 6 25 25 221 212 137 196 187 112 171
PW Width across flats B1 2 x Cushion valve MM E BF FV FY D e B H K A AL H1 C B N BN FT l 10.2 h + l FX FZ ZZ + Stroke S + Stroke M ZZ + l + Stroke Long stroke (Stroke of 1001 mm or more) 50 to 100 P (Rc, NPT) Head side cylinder port 2 x Cushion valve 4 x FD 4 x J With rod boot When the stroke is 1001 mm or longer, a tie-rod reinforcement ring is attached.
Local Area: (800) 258-9200-www.stevenengineering.com S + Stroke Z + Stroke 16 to 32 Rod end nut 2-P through 2-M5 x 0.8 (32: Rc 1/8) Width across flats L 2-P through 4-T counterbore A' Auto switch S + Stroke Z + Stroke Rod End Nut/Accessory Material: Carbon steel Part no.