Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37

Rotary Gripper Series MRHQ

x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 Depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 SMC R R 16 8 E O P T P A I R R Y G A R I 36 Side A Side B Scale: 40% 11 Series MRHQ Rotary Gripper 1in = 25.4mm Dimensions (mm) Scale: 50% MRHQ25 A B 58 70 93 4-M5 x 0.8 Depth 8.5 47 66h9 0 0.074 33.3 opened +2.5 0.2 10 0 0.1 12 0 0.06 M5 x 0.8 Finger closing port 19.3 closed 0 0.8 4-M5 x 0.8 (mounting

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

) M5 x 0.8 (External pilot port) 21.5 21 Manual override 38 4 Insulation Black () B A 23 23 E P B A X Insulation Red (+) 46 EB EA P 21 69 21.5 M5 x 0.8 (Pilot EXH. port) 92.6 44.1 67.2 180.8 L 71.2 (For E type) (Lead wire length) 1.55 0.3 mm2 26.5 13.5 11.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33 96.9 L plug connector with cover (LL) 3 02 03 52-SY7440 (R) -LL5

Compact Vacuum Ejector Series ZQ

for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

Bernoulli Gripper

The pressure sensor is shipped together with the product but does not come assembled. 12 ZNC Series Dimensions: 30, 40, 60 Basic type M5 x 0.8 thread depth 4 Air supply port PB1 M5 x 0.8 thread depth 4 Multi-port2, 4, 6 4 x H thread depth J R 16.5 Counterbore diameter P, depth Q Counterbore diameter P, depth Q 6.5 45 45 30 M5 x 0.8 thread depth 4 Air supply port PA1, 4 120 120 A Counterbore

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Series M Miniature Fittings M3, R(PT) 1/8, M5

M-5HL-6 P. 92 M-01AN-6 P. 90 6/4 6/4 P. 93 Plug To plug unused M5 port. Barb fitting M-01AU-4 Hose elbow(H) M-5HLH-4 4/2.5 4/2.5 M-5P For soft nylon and polyurethane tube. 1 8 R(PT) P. 93 Gasket M-01AU-6 P. 90 M-5HLH-6 P. 92 6/4 6/4 To seal M5 thread. M-5G1 Hose nipple M-01H-4 Elbow P. 93 4/2.5 For nylon, soft nylon and polyurethane tube.

CL

(mm) A A1 E1 L1 MM U1 NX NZ L R1 R Part No.

Modular Type Lubricators Series AL

26 35 47 N 8.4 8 10.5 Q 2.3 2.3 2.3 L 22 23 26 P 40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53

JIS Standard Hydraulic Cylinder

3 @3 r @5 !

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

CXS

L M N NN P Q QQ R X Y U Model 2-3.4 through 2-6.5 counterbore with depth 3.3 4-M3 x 0.5 with depth 4.5 2-M4 x 0.7 with depth 7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30 M5 x 0.8 x 5 CXS10 2-4.3 through 2-8 counterbore with depth 4.4 4-M4 x 0.7 with depth 5 M5 x 0.8 x 10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9

15

66.9 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50 36* 4.5* 41.4 89.8 66.9 M4 x 12 M5 x 25 10 40 * Dimensions after mounting a ring spacer 803 LEFS Series Dimensions: Motor Flange Option Motor mounting position: Motor parallel e w q r PD (I.D.)

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHL2 Internal/External Holding Capability MHR port port Connection Port on 2 Sides MHK MHS MHC2 MHT2 MHY2 MHW2 (Nominal size) 10 15 20 30 Auto switch Standard Model MRHQ MHR2 P.2.3-3 to P.2.3-16 Auto switch 2 finger MDHR2 Rotary actuated air gripper MHR3 P.2.3-17 to P.2.3-25 3 finger MDHR3 2.3-2 Rotary Actuated Air Gripper Series MHR2/MDHR2 2 Finger/10, 15, 20, 30 How to Order MHR 2 10 R

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

How To Order,/NVV4Zl Manifold Nvv4zl ::P r =*na, acc$ory F : Mounting brackets 'A .v?

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How To Order,/NVV4Zl Manifold Nvv4zl ::P r =*na, acc$ory F : Mounting brackets 'A .v?