ZP3

B3 M3 x 0.5 One-touch fitting 02 2 Male thread A6 M6 x 0.75 04 4 Barb fitting U2 For 2 polyurethane tubing2 U4 For 4 soft tubing3 Nil 1 Female thread B3 M3 x 0.5 One-touch fitting 02 2 04 4 Female thread B3 M3 x 0.5 1 Use the connection thread.

Table of Contents

(mm) Pad type Material Series ZPT Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter (mm) 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) Connection ZX Symbol 2004 2 x 4 Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 ZR 4010 4 x 10 02 04 2 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 M5 x 0.8 M6 x 1 M8 x 1 Male thread Female

VM

roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.8 (SYJ714R: X port) + 58[65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): 10-SYJ74M-L01 02 M plug connector (M): 10-SYJ74M-M01 02 DIN terminal (D): 10-SYJ74M-D01 02 M8 connector (WO): 10-SYJ74M-WO01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 MAX.10 58[65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1[76.1] Approx. 300 (Lead wire length) 80.6[82.8

SV

n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

KR

4 14 1 4 KGE04-02 17 Connection thread 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 30 Applicable tubing 6 M14 x 1 15 17 13.1 10.4 17 19 29 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 x 1 18.5 8 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 41.5 29.5 53 67 34.5 36.5 12.5 14 21 21 M20 x 1 10 22 24 3 8 KGE10-03 3 8 KGE12-03 92 59 37 14 12 M22 x 1 27 23 24 58.3 46.1 22 1 2 KGE12-04 41 18 3

Compact 5-Port Solenoid Valve

n1 + 9 x n2 + a + b x n3 L2 = 6.5 x n1 + 9 x n2 + 43.4 M = {(L1 + c) / 12.5} + 1 Decimal fractions are truncated.

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B

2/3 Port Valve

(VX31, 32, 33) DC AC VX32 Sketch DC AC Position OFF PwA APw PwA APw PwA ON PqA APq PqA PqA APq OFF X X PA X PA ON X X AR(VP) X AR OFF X X AR(VP) AR X ON X X PA PA X VX33 Selector Divider Vacuum pad (1) DC Example of application Note) They are values in an ambient temperature of 20C 5C and application of rated voltage.

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series MB/CA1 Body ported Series CJ2 Series CM2 Tube x Length T0604 x 1 m VQZ1151-01 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T0806 x 1 m VQZ2151-02 Speed controller AS3001F-06 AS3001F-08 Silencer AN200-02 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m VQZ3151-03 Speed controller AS3001F

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3302F-06 12 x 1 m AS4002F-12 AN20-02 AS2302F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing diameter x Length Speed controller Silencer Base mounted Tubing diameter x Length Speed controller Silencer AN20-02 AN3301F-06 AS1302F-06 6 x 1 m AS3002F-06 10-SYJ7123

SYJ3000/5000/7000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

Intrinsically Safe Valve

2 x 1/4", 3/8" {4(A), 2(B) port} 46 (E-type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 2 x 4.4 (Mounting hole) (12) 24.9 43.85 L (Lead wire length) 153.4 3 x 1/4" {1(P), 3(EB), 5(EA) port} 56.3 23 0.5 0.5 EB 3 P 1 EA 5 49.8 02 03 L-type plug connector with cover (LL) 53-SY9120-LLInsulator: Red (+) Insulator: Black () 4.1 16.7 0.3 mm2 L (Lead wire length) 148.3 02 03 Terminal type (TT) 53-SY9120-