KR M5 For soft nylon tube M5 female x M5 male Body rotates at 360 around the stud axis MS-5AU-3 For polyurethane tube 3.18, 2 x M5 P . 27 Universal tee MS-5UT M5 female x M5 female x M5 male P . 27 Body rotates at 360 around the stud axis 4, 2.5 x M5 MS-5AU-4 For soft nylon and polyurethane tube Push For reducing Rc 1/8 female to M5 female R x M5 female 1 8 6, 4 x M5 MS-5B MS-5AU-6 P . 28 P
Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W NV Mounting type V NU Mounting type U NT Mounting type T NM1 Mounting type M1 NM2 Mounting type M2 * Refer to the applicable stroke table. w Size 25 32 40 Applicable Stroke Table : Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 LEFS32
Specifications Table 5-1 EX260-FPS1specifications Item Description General Dimensions (W x L x H) mm 28.2 x 102.4 x 78.0 Weight 200 g or less Housing material PBT Rated voltage 24 VDC Supply interruption for no loss of function 1 ms and less Protection class IP67 (when fully installed or fitted with protective cover) (complies with IEC 60529) 10 Mega ohms or more between FE and other terminals
Without Guide Operating Conditions Model : ML2B32 Load : 15N Speed , Va : 0.25m/s Pressure : 0.5MPa L1 : 0.05m L2 : 0.05m W W L1 L1 Loading Static Load Dynamic Load Side load due to W W3 Moment due to W M2 Moment due to we when stopping M3 V M1 V Static Load
W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..
Note that the products used for the port size A2 or A3 are not available at SMC.
IP address setting The IP address is set either using the manual setting of the IP address X/Y switch, or by remote control (with the IP address X switch set to "000"). When setting the IP address by remote control, first obtain the IP address through the BOOTP/DHCP Server, then select the Disable DHCP button to hold the IP address. 2.
M3 x 30 screw for connection to the valve manifold.
5<3'95 % A " 8 " $ )% % 8 % =) *% $ ) 2% 8 % " 1 ,% 2 % ) .BB & A & 1% % $) $ ) ) ) ) ) 88 % ,) ; ' ; 8 1 ) /% ) / , A & 1% % '$ , $ 3 :; C $ 1 ,) ; ' ; ) ) ) ) 88 % /% ) / VQD VKF .$ VK VT VS t o r e q y u i w & q w e r t y u & D % % ' % % ' % % ! ! ! , !%,' ? !2! 8 % 8 % ? ( , 0( , = ) % $ B /EB3A /EB '!'
Mount of single unit 24 or more 0 0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) ZSE ISE 31 0 0.4 0 0.4 31 ZSP PS ISA PSE IS ISG ZSM Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 851 Series PSE300 Dimensions PSE3T 38 8 x M3 3 x 7.2 (= 21.6) Front protective cover (Option) 2 x 3.4 mounting hole (Rotate 90 to mount) 6.4 2 x 6.4 1 2 3 4 35.5 28
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
H (width across flats) D3 D3 L5 A1 L5 A1 A2 D1 D1 A2 T T Inch sizes L4 L5 A1 A2 M1 Max.
A1 D1 L5 D1 A2 T T Metric size L4 L5 A1 A2 M1 Max.
(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Y, Z directions, for 2 hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case
Troubleshooting Danger: Self tapping screws: Nominal size 3 x 8L Self tapping screws: Nominal size 3 x 8L When the products with a units selection 1 DC(+) Error indication function Brown DC(+) Operator When other than [USEr] is selected, press the button to move on to the display unit setting.
A2 Bracket B (Horizontal mounting) Part no. Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)
. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 9 Series ZSE30A(F)/ISE30A Function Details A Copy function (F97) The settings of the master sensor can be copied to the slave sensors.