Possible to transfer a workpiece at low-speed.

8 @0 @0 MSQ MSZ y w i !5 q r q w r y !5 !6 i CRQ2X MSQX CRQ2X MSQX MRQ Component Parts Component Parts Description Material No. Description Material No.

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Smooth Cylinder/Low Speed Cylinder

W X Y X Y Z LX (Knock pin position) 4 x LD LZ Axial Foot Style (mm) Y 7 7 8 8.5 11 13 14 16 X 15 15 16 16.5 22 22 28.5 30 W 10 10 10 10 17.5 17.5 20 20 M 3 3.5 3.5 4 5 5 5 7 LZ 44 49 58 71 86 106 125 150 LX 32 36 44 54 66 82 100 120 LT 3 3 3 3 4.5 4.5 4.5 6 LS 53 53 53 60 67 67 74 74 LH 20 22 25 30 40 45 55 65 LD 6 6 7 7 10 12 11 14 LC 4 4 4 4 5 5 6 6 Bore size (mm) B 34 38.5 45 54.5 70.5

Battery-less

5 r t w q y !6 !

MY1

Horizontal mounting y P. 8-11-6 x y W: Workpiece (2 kg) x z 3. Ceiling mounting 4.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Table of Contents

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

Table of Contents

0 w !2 u t o !3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

•

P R across flats 1 2 , oj Iir w w \ M8X 1.25 I . j 0 >-j / ~ P 3.5 I 'A ~.8 Flat type Flat with rib (mm) Flat type . Flat w~h rib (mm) Model . .A .8 C JD ' Model 'A .8 C D E F I:M6x1 I:Ma XI y I I: Ma x l Y E F I r.M6 Xl G c H G H ..JatlFlat1>ilt1 rib I . .

VFS

0, Terminal i, Metal joint q, w, Gasket e, r, O-ring y, u, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket e, r, O-ring y, u End plate (U) !1, Metal joint q, w, O-ring t, y End plate (U) !1, Metal joint q, w, O-ring t, y End plate (D) !2, Metal joint q, w, Gasket e End plate (D) !2, Metal joint q, w, Gasket e 02 03 VVFS3000-1A-1Plug-in type Manifold block assembly !

5

-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

ZP3

(Trivalent chromated) M6 x 0.75 M12 x 1 Steel (Zinc chromated) M10 x 1 5 Fitting 6 Cassette Vacuum inlet direction Lateral Y Type/ZP3-Y ZP3-Y-B-B ZP3-Y-B-(02/04/06) w e Vacuum inlet Vacuum inlet q Component Parts ZP3-Y-B-(U2/U4/U6) No.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Table of Contents

1 Drain q r e w t i u y o !0 !

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A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .