44

2.5, 4 x 3, 6 x 4, 8 x 6, 10 x 7.5 10 x 8, 12 x 9, 12 x 10, 16 x 13 Tubing size Note) For soft nylon tubing, soft polyurethane tubing, hard polyurethane tubing, antistatic polyurethane tubing, water cannot be used.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

mounting adaptor: VV317-02-1-02-A 4 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) VV061 VV100 DIN terminal facing upward 141.6 V100 S070 VQD n x 1/4 4 x 3/8 VQD-V Applicable cable O.D. 6 to 12 VK VT VT L Dimension n: Stations Stations Formula L1 = 46 x n + 89 L2 = 46 x n + 59 2 181 151 3 227 197 4 273 243 5 319 289 6 365 335 7 411 381 8 457 427 9 503 473 10 549

SYJ300/500/700

0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 VP 26 20 X S070 1/4, 1/8 (P, R port) 23 15 48 VQ VKF VQZ L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (WO): SYJ74-WO01 02 VZ VS VFN Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire

42

Note Option mounting diagram Single valve AXT632-17-4 (M3 x 37) 3 Valve 0 Blanking plate (VVQ4000-10A1 5 ) AXT632-38-1 (M3 x 14) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ4000-P1 5 02 03 ) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve + Individual EXH spacer (VVQ4000-R1 5 -02 03) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x

Clean Gas Filter

IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

/pressure centre L plug connector (L) 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 3 7 52-SY7420-L-02 (-F2) 5 52.8 39.8 Insulation: Black () B 13.6 Manual override Insulation: Red (+) A 2 x 4.2 (Mounting holes for manifold) 20 42 2 x 1/4" {A (4), B (2) port} (52) (2 x 4.2 Mounting holes) 44 (For E type) 0.3 mm2 (42.5) (49.5) 40 40 24.5 14.7 1.55 (1.2) L 180.8 (Lead wire length

5 Port Air Operated Valve

) 42 (45) 52 (58) B A B A PE PE 6.5 6.5 SYJA 5EA 3EB 1P 5EA 3EB 1P 97.5 2 x M5 x 0.8 (Breathing hole) 22.5 (26.5) 2 x M5 x 0.8 (Breathing hole) 22.5 (26.5) 94 2 x 5.3 (2 x 6.5) (For mounting) 2 x 5.3 (2 x 6.5) (For mounting) 119 VZA 110 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) VTA VGA 74 (78) 74 (78) 28.5 (32.5) 28.5 (32.5) VPA 1/4, 3/8, 1/2 [1 (P), 5 (EA), 3 (EB) port] 30 (31) 30

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Air Fittings & Tubing

M D1 D2 L1 Urethane KQ2LF04-M5 KQ2LF04-M6 KQ2LF04-01 KQ2LF04-02 KQ2LF06-M5 KQ2LF06-M6 KQ2LF06-01 KQ2LF06-02 KQ2LF06-03 KQ2LF08-01 KQ2LF08-02 KQ2LF08-03 KQ2LF10-02 KQ2LF10-03 KQ2LF10-04 KQ2LF12-02 KQ2LF12-03 KQ2LF12-04 M5 X 0.8 M6 X 1.0 14.5 8 8 5 3.5 3.5 15.5 21 24.5 15 16 22 25.5 26 4 10.4 16 18.5 1 8 1 4 14 17 13 20 5 6 13 10 4.2 4.2 M5 X 0.8 M6 X 1.0 3.5 3.5 8 8 6 17 1 8 12.8

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA412-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.14 2.0 N.C. Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

VFA3000

3 x , 18 14 VZA (P , A, B port) VFA VFRA 2 x 4.3 VA (Mounting hole for manifold) 2 x 4.2 (Mounting hole) 2 x 18 (Pilot port) 2 x M5 x 0.8 (Breathing port) 2 x 18 (R1, R2 port) 1765 Series VFA3000 Dimensions: Base Mounted 2 position single: VFA3140-02 03 2 position double: VFA3240-02 03 2 x 4.3 2 x 4.3 (Mounting hole) (Mounting hole) 2 x 18 (Pilot port) (Pilot port) Max. 3 Max. 3 3 (Breathing

ZP

(mm) Pad type Material Series ZPT Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter (mm) 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) Connection ZX Symbol 2004 2 x 4 Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 ZR 4010 4 x 10 02 04 2 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 M5 x 0.8 M6 x 1 M8 x 1 Male thread Female

Pressure Gauge Guide

MPa G46-2-01 to 02-SRA 0 to 0.2 44.5(46.5) 5 44.5(46.5) G46-2-01 to 02-SRB G46-4-01 to 02-SRA 0 to 0.4 G46-4-01 to 02-SRB M5 x 0.8 x 5 M5 x 0.8 x 5 8 1 R MPa 4 1 R G46-7-02-SRA 0 to 0.7 G46-7-02-SRB M48 x 2 M48 x 2 G46-10-02-SRA 0 to 1.0 G46-10-02-SRB Note) Do not apply pressure more than the maximum display pressure. This will cause a malfunction.

Secondary Batteries

2, Mounting bolt x 8 Flange x 1, Mounting bolt x 4 Trunnion pin x 2, Trunnion bolt x 2, Flat washer x 2 Clevis x 1, Mounting bolt x 4, Clevis pin x 1, Retaining ring x 2 Pivot bracket x 1 13 Air Cylinder: Standard Type Double Acting, Single Rod 40, 50, 63, 80, 100 CDA2 Series 9091How to Order CDA2 L 50 100 M9BWL 90 With auto switch Series compatible with secondary batteries Number of auto

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

3 Port Air Operated Valve Series SYJA300

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2 1/4" 19 AS321F-02-09 AS321F-