5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Tighening torque of 0.3 to 0.4 Nm) VZS A VFS Circuit with light VS AC circuit DC circuit VS7 1 2 1 2 NL: Neon light R: Resiser LED: Emitting diode R: resister NL R R LED Valve Mounting B Fitting and Silencer Part No. for P, R Ports When Using Valve as an Individual Unit After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque

PSxx-OMV0003CN

bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y 1110 0x0456 0 R/W drE () U8 0 Y 0 1(1/10) 1140 0x0474 0 R/W Cut (Zero-cut) U8 0 Y 010 0 0 1.0% 1800 0x0708 0 R/W Eco () U8 0 Y 0oFF 1on Pin () U8 0 Y 0 1 1810 0x0712 0 R/W 1811 0x0713 0 R/W NPin () U16 0 Y 0999 a F32 N 2000 0x07D0 0 R (63 ) 2001 0x07D1 0 R b F32 N 2002 0x07D2 0 R U16 0 N 6163 2003 0x07D3 0 R

PSxx-OMV0008CN

(19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

NCA1

Note) Lead wire length symbols: 0.5 m Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-7 7 Series NCA1 Basic Style: NCA1B (MX0 mounting style) ZB + Stroke P + Stroke D across flats 4-DD 2-EE (NPTF) AA KK EA MM BA B A C R WF G J E LF + Stroke Bore size (in) MM KK A AA B BA C D DD E EA EE G J R WF Y LF P ZB 150 (1.5") 5/8 7/16-20 3/

NCA1

J G R CM2 WF E TL TL LF + Stroke ZB + Stroke A CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB TD0.001 0 ZB P LF Y WF TL R J G Bore size (in) MM KK A AA B C D DD E EA EE 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 1 4 3/4 2.36 3 5/8 1.71 1 1

VM

R. 3 port only Force Component Parts POM PBT Material Note No.

IIIIIIIIII

Model Number Description R-800-XX-W/K Precision regulator with adjusting knob R-800-XX-W/S Precision regulator with 1/4" adjusting shaft R-800-XX-W/OS Precision regulator with slotted adjusting shaft R-801-XX Factory pre-set regulator R-810-XX-W/K Non-bleed, non-relieving with adjusting knob R-810-XX-W/S Non-bleed, non-relieving with 1/4" adjusting shaft R-810-XX-W/OS Non-bleed, non-relieving

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

AC Servo Motor Driver (Pulse input type/Positioning type)

Symbol Name Initial value Unit PC01 STA Acceleration time constant 0 ms PC02 STB Deceleration time constant 0 ms PC05 SC0 Internal speed command 0 0 r/min PC06 SC1 Internal speed command 1 100 r/min PC07 SC2 Internal speed command 2 500 r/min PC08 SC3 Internal speed command 3 1000 r/min PC31 SC4 Internal speed command 4 [Applied] 200 r/min PC32 SC5 Internal speed command 5 [Applied] 300 r

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

F

D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Standard stroke (mm) Model 100 75 50 40 30 20 10 CXSM6-R CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R 0.105 0.105 0.18 0.18 0.3 0.32 0.465 0.485 0.72 0.73 1.33 1.35 0.12 0.12 0.2 0.2 0.33 0.35 0.5 0.52 0.76 0.77 1.43 1.45 0.135 0.135 0.225 0.225 0.355 0.375 0.54 0.56 0.8 0.81 1.53 1.55 0.15 0.15 0.25 0.25 0.38 0.4 0.58 0.60 0.84 0.85 1.62

LJ1H

F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult SMC.

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Compact

,.);:-| I Driver unit lt lllnm --i -"r I ' I r_coo-r l]jj ,Tt-r f#posi,ioninsi I | *.!{l ). I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!