10%6046Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)275UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Request to read Address BCC data End code Identification code Start code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address Start code BCC data Affirmation code End code Numerical data Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

Air cooled Thermo-con (Compact type)

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Address BCC data End code Request to read Start code Identification code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address BCC data End code Start code Numerical data Affirmation code Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

IDX-OM-W094

. 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)175UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

5 to 50 C Note 1)Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)5.5 MPa?5 to 50 C Note 1)20 times/minVertical upwards3/4?10.6 ?1101/45.6100

Title not found

Bore size 50, 63, 80mm Coordinates with the external stopper and forms the toggle mechanisms. Arm opening angle 30, 45, 60, 90, 105, 120, 135 Switch TURCK/P&F Both TURCK and P&F switches are available. Port thread NPT/G Reduces the effects of impact from unclamping the cylinder. Arm Variation Prevents the infiltration of spatter, dust and other contaminants.

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Regulator for 2 MPa ARX 20

F C D E Setting the Indicator Needles Move the indicator needles with your fingers. If it is done with a small screw driver, etc., take care not to bend the indicator needles or scratch the gauge dial. There are 2 green indicator needles, to be set at the upper and lower limits of the pressure range.

IDX-OM-U010

Coefficient factors Inlet air temperature (oC) 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 to 1.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 Ambient temperature (oC) 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 Calculation example: The air flow capacity when the dew point of IDFC60 is set to 10 oC

50 mA or lessIP40 (Manifold assembly)CE marking, UL (CSA), RoHS recognition0.6 lbs (300 g)

50 mA or lessIP40 (Manifold assembly)CE marking, UL (CSA), RoHS recognition0.6 lbs (300 g)

With the use of D-sub output blocks, a maximum of 9 remote D-sub manifolds can be attached to one EX600 communication module. This serial interface is compatible with series SV1000/2000/3000, VQC1000/2000/4000, S0700 and the new SY series valves.

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)