Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Symbol Manifold Without port Nil 0 2 3 5 Filter only Vacuum pressure switch 0 1 2 3 4 5 Without fitting (M5 x 0.8) Without fitting (M5 x 0.8) VVQ1000-50A-M5 KJS04-M5 4 (Straight) 3.2 (Straight) KJS23-M5 VVQ1000-50A-C3 Single unit KJS06-M5 6 (Straight) 4 (Straight) KJS04-M5 VVQ1000-50A-C4 KJL04-M5 4 (Elbow) 6 (Straight) KJS06-M5 VVQ1000-50A-C6 3.2 (Elbow) KJL23-M5 VVQ1000-F1-LC3 4 (Elbow

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]

SYJ300/500/700

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52 Type SS3YJ5-20 Body ported for internal pilot M5 x 0.8 0.47 0.71 0.98 0.71

SYJA3000

port) (Piping port) 21.5 R1 P 8.5 6 6 R2 15 1.8 (Bleed port) With filter (80 Mesh) 217 17 21 45.5 24 32 3 position closed center/exhaust center/pressure center: SYJA5 20-M5 3 position closed center/exhaust center/pressure center: SYJA5 40-01 3 4 5 3 4 5 28 2-M5 X 0.8 4.3 22-M5 X 0.8 37.5 23 (Pilot port) (Mounting holes) (Pilot port) (Mounting holes pitch) A B 1 A B 11 5 3 1 24 A B 1 1 R

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

REA/REB

M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 105 RB REBR32 M8 x 1.25 x 10 13 76 7 7 M6 x 1 8.5 Rc 1/8 54 26 33 28 50 27 116 J X Y Z Model REBR15 18 54.5 98 DREBR25 28 72 125 REBR32 35 79 148 -X 20Data 10-2-71 71 Series REBR Proper Auto Switch Mounting Position (Detection at Stroke End) A B C D 15

REA/REB

8 Stainless steel Wear ring B Special resin Cylinder tube w !

5 Port Air Operated Valve SYA3000/5000/7000 Series

SYA714002 03 57 77.5 42 10.4 61 M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 69 6.4 2 x 4.3 (For mounting) 87.5 1.8 (Ventilation hole) 26.5 13.5 20.5 20.5 3/8, 1/4 (P , EA, EB port) 33 3/8, 1/4 (A, B port) 21 22.5 2 position double SYA724002 03 11.5 13.5 57 5.1 71.1 42 61 4 2 x M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 15.1 69 2 x 4.3 (For mounting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CG1N20-PS CG1N25-PS CG1N32-PS CG1N40-PS CG1N50-PS CG1N63-PS CG1N80-PS CG1N100-PS Contents C85 Rod cover Tube cover Piston Piston rod Bushing Bumper A Bumper B Snap ring Wear ring Rod end nut Piston gasket Cushion ring A Cushion ring B Seal retainer Cushion valve Valve retainer Lock nut Cushion seal A Cushion seal B Cushion ring gasket A Cushion ring gasket B Head cover Cylinder tube Rod seal

SYA3000/5000/7000

) Manual override (Non-locking) 1.3 (Ventilation hole) M5 x 0.8 (P , EA, EB port) 2 x 1.5 die-cast hole (For manifold gasket positioning) SYA3120-M5 M5 x 0.8 (A, B port) 1732 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported 2 position double SYA3220(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

5 Port Air Operated Valve

Bracket (for VFA1000 double) DXT144-8-1A (With 2 mounting screws) 1501 VFA1000/3000/5000 Series Dimensions: VFA1000 Series/Body Ported 2 position single VFA1120-M5(-F)(-P) 2 position double VFA1220-M5(-F)(-P) (11.7) (11.7) (Distance between ports) (Distance between ports) 38 M5 x 0.8 [4 (A), 2 (B) port] M5 x 0.8 [4 (A), 2 (B) port] 26.4 (4) 6 14.8 5 B 2 B 2 26.4 10 10 1/8 (Pilot port: Upward

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Sensors 3 position exhaust center D: Push-turn locking slotted type J: With switch 2(B) (A)4 4 M5: M5 x 0.8 (EA)5 1 (P) 3(EB) 3 position pressure center A 4 2(B) (A)4 5 2 B (EA)5 1 (P) 3(EB) For switch operation, refer to page 412.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter A1 Bracket A e Unit specification r Piping specification Symbol Description Nil Units selection function*2 M SI unit only*3 P Units selection function (Initial value psi)*3 Symbol Description 02 R1/4 (M5 female threaded) N02 NPT1/4 (M5 female threaded) F02 G1/4 (M5 female threaded) C01 Rc1/8 A2 URJ1/4 (Face seal fitting) B2 TSJ1/4 (Compression fitting) ZS-46-B Panel mount

42

(Double) 163 (3-position) 58.2 96.2 458 Base Mounted Plug-in Unit VQ4000 Series Bottom ported drawing SV SYJ M5 x 0.8 Ground screw 1/8" External pilot port SZ 10.7 47 106 VF 1/4" 4(A), 2(B) port 9 71.7 Connector location on U side (FU) 9 U side VP4 27 n VQ 1/2 X 12 X B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 VQ 4/5 VQ 4/5 8 A A A A A A A A B B B B B B B B VQC 1/2 7 SMC SMC SMC SMC SMC SMC SMC 6 VQC

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

LX

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

VZ100/300/500

M5 x 0.8 b Cv b Cv VV3Z1-01-1 VV4Z1-20-1 1/8 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/-6 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 Width across flats 7 Model A B C D E F G H I M M 12 13.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 5.5 6 15 16 7 8 5 6 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L Tee: M-5T M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Weight: 3.5 g Weight: 4.2 g Universal Elbow: M-5UL Universal Tee: M-5UT Width across flats 7 2 x M5 x 0.8 Width across flats 7 M5