Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

PSxx-OMS0006CN

N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -64No.PS-OMS0006CN-G A B -65No.PS-OMS0006CN-G 0.5~7 + 0.5~7 -66No.PS-OMS0006CN-G 2 (n ) <> <> (n -1) (n -1) -67No.PS-OMS0006CN-G Revision history A B [2016 9 ] C [2018 6 ] D [2020 2 ] E [2021 2 ] F [2022 1 ] G [2022 10 ] 4-14-1, Sotokanda

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

BP1000

Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld FV4 MV4 TW4 FV6 MV6 TW6 Seat material Material Code Material Viton (Standard) PTFE Kalrez Diaphragm Code Body 316L SS secondary remelt Nozzle 316L SS Hastelloy C-22 No code TF KZ S SH Pressure gauge unit 2) Surface finish Unit psig

CRB1/Size: 10, 15, 20, 30

R Q2 B P C F(h9) D G1 G2 J K L M N Q1 E(g6) Q3 Model A 90 180 270 M5 M3 CRB1BW10-lS CRB1BW10-lSE CRB1BW15-lS CRB1BW15-lSE CRB1BW20-lS CRB1BW20-lSE CRB1BW30-lS CRB1BW30-lSE 3.4 (5.5) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 0 0.036 15 24 8 0.004 0.012 9 14 3 1 5 9 0.5 29 4 M3 M3 (5) M5 M3 3.4 (6) M3 (10) 0.004 0.012 0 0.043 20 29 9 12 18 5 4 1.5 6 10 0.5 34 M3 M4 (7.5) 4.5

Hand Valve Series VH

C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89 88 4-6.6 4-6.6 88 81 94 148 144 97 97 67 1.5 65 1.5 125 123 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/8

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum

Low Profile Slide Table Series MXF

GR-S-005 (5 g) GR-S-010 (10 g) GR-S-020 (20 g) GR-S-050 (50 g) GR-L-005 (5 g) GR-L-010 (10 g) GR-L-020 (20 g) GR-L-050 (50 g) Applied part Guide Cylinder Dimensions: Stroke Adjusting Bolt Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25

MXF

Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions

Hand Valve Series VH 1

VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5 4-6.6 VA 62 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 134(159) VR 97(122) VH 125 94 VHS M40 x 1.5 8 (10) 1.5 M8 x 1.25 106

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

Hand Valve Series VH

) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-11 Series VH Dimensions: Body Mounted VH600-06/10 2 (A) 4 (B) 32 1 (P) 132 152 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5 4-6.6 VA 62

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

C dimension is 77 mm. Part no.: MGPM20-39Z-XB10 Special body manufactured for 39 stroke. C dimension is 76 mm.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40 (1 1/2B) 40 (1 1/2B) 1 1/2 1 1/2 160 160 50 (2B) 50 (2B) 260 260 65 (2 1/2B) 450 80 (3B) 600 Note) Tapered female thread connection conforming to JIS B 0203 is compatible.

Stainless Steel 316

LT C edition Safety Instructions Be sure to read Precautions for Handling Pneumatic Devices (M-03-E3A) before using.

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Bumper bolt (resin tipped): Mounted on both sides Nil Bore size 6 10 15 20 25 32 40 Bumper bolt (Same as the opposite side) 6 mm Port thread type Adjustment bolt (Same as the opposite side) 10 mm Bore size (mm) Symbol Type 15 mm Shock absorber/ Adjustment bolt (metal ended): Mounted on both sides 6,10,15 M thread B 20 mm Nil Rc 25 mm TN TF 20, 25, 32, 40 NPT 32 mm Shock absorber (Same as

Hydraulic Cylinder

Hydraulic Cylinder 20, 25, 32, 40 CHN Series 7 MPa CHQ How to Order CHK CHN CHN CHN 25 100 M9BW L C CHM Auto switch mounting bracket Note) Note) This symbol is indicated when the D-A9 or M9 type auto switch is specified. This mounting bracket does not apply to other auto switches (D-C7 and H7, etc.) Applicable to 20 only.

Speed Controller: Standard Type Series AS In-line Type

2 U seal Retaining ring for hole type C HNBR Tool steel y !

EXxx-OMU0020EN

(between FE and all accessible terminals) Insulation resistance 10 M or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z Vibration