Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

Steam Valve

Brass Platinum silver painted PTFE, EPR, FKM Plate assembly Valve element Piston assembly Return spring Second plate assembly Brass, PTFE Aluminum alloy Piano wire Aluminum alloy Body option S is made of stainless steel. 636 Steam Valve: 2 Port Valve For SteamVND Series Port size: 6A, 8A, 10A (Valve open) Pilot port 12(P1) 2.5 Indicator (Option) 1 8 2 x 2 x 1/8 (Back side 10(P2)) P1 51.5 75

High Pressure Coolant Valve

96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75

3 Port Air Operated Valve VPA3145/3165/3185 Series

570 650 650 670 650 670 2 2 1.5 VPA3165 11 4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1/4 (PA port) [External pilot specification] Lead wire length 200 mm Manual override 1/4 (PE port) 11/4" (EXH port) NO NC 2 8.5 2 x 8.5 (For mounting) PA PE (Mounting hole) 163.3 26 108 108 75

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

(Values at the initial period) Solenoid Specifications VT325-G V100 S070 Symbol VQD (A)2 VQD-V Grommet, Conduit, DIN terminal, Conduit terminal 100, 200 VAC, 50/60 Hz, 24 VDC 15 to +10% of rated voltage 75 VA 60 VA 27 VA 17 VA 12 W Electrical entry VK Coil rated voltage Allowable voltage fluctuation (R)3 1(P) VT VT 50 Hz 60 Hz 50 Hz 60 Hz Inrush AC Apparent power (3) Holding DC Power consumption

Angle Seat Valve /

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

Air Suction Filter

Adaptable for a manifold application ZFA20 200 1/4 Cartridge type allows element replacement ZFB Unrestricted 360 piping tube mounting on the IN side 4 10 ZFB10 Universal joint type 6, 3/16" , 1/4" 20 Easy installation and removal with One-touch fittings 6, 1/4" 30 Light and compact molded resin parts ZFB20 P.279 30 8 50 Cartridge type allows element replacement ZFB30 8, 10, 3/8" 75

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 60 Suction flow 40 Air consumption 20 0 0 20 40 60 80 Suction flow [L/min(ANR)] Supply pressure [MPa] ZHP-15 ZHP-15 (Supply pressure: 0.35 MPa) 100 100 90 80 70 60 50 40 30 20 10 0 150 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 120 105 Air consumption 60 90 75

ZP3

Construction Precautions Mounting Bracket Assembly 4 2 Vertical Lateral Area 75% reduction Male thread Female thread Barb fitting (Applicable tubing: 2) One-touch fitting (Applicable tubing: 2) Female thread Barb fitting (Applicable tubing: 2) One-touch fitting (Applicable tubing: 2) 2 x 7 pcs. 4 x 7 pcs.

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(Panel adaptor A+Panel adaptor B) ZS-22-A Standard Specifications Positive pressure Item Vacuum 1OOkPa{1.02kgticm2} type 1MPa{IO.2kgl/cm1 ~pe Panel adaptor A Z$2201 Model ZSE4B ZSE4B I ZSE4B ISE4LB ISE4LB I ISE4LB ISE4B ISE4B ISE4B -0-25 -0 -26 -0 -65 -Ql-25 -0-26 -0-65 -0-25 -0-26 -0 -65 Switch Pressure 10 -101kPa 1 0 1OOkPa -0.1 1MPa Panel adaptor B ZS-22-02 ; display range {75 -760mmHgl

ZSE5/ISE5

1 sheath} Argon 0 SUS630 Pressure sensor Nitrogen gas 0 Firtil1Qs SU$304 Chlorine gas X 2 Digital pressure switch for general purpose fluid Series Z5E5/15E5 Dimensions (mm) Scale: 75% 30 39 LCD With back light g '" .; ~ '" '" DOWN button UP bulton ~ .{ LED (red) I SET button T2 NPTF'4 M5X O 8 deplh 5 I 12.3 20 4 .0' 2.7 17 depth 6.5 i 28 View A With bracket 50 (44) 4.%4S 40 30 39 II i

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Bodv PST Seat NSR 0 Lead wire Vinvtchloride (V,nvl sheath) Pressure sensor SUS630 G Fittings SUS304 2 Digital Pressure Switch Series ZSE6/ISE6 URJ'/4 Scale:75% (mm) Dimensions 30 (Union Ring JOint) 39 LCD W.lh back hght o -A '" '" ~ 00 '" []I-: 1DOWN button UP bulton [ ,~ LED (red) LED (green) I SET bunoo [, t::t::;I UAJ~ L 12.3 Sensor Depth 6.5 kj--t==:;A/ Welded section 2-flf2.7 20

CV/MVGQ

(Crimping tool: model number DX170-75-1) MXQ In the case of DC wiring, connect the wires by matching their polarities to the and marks.

MY1

Fine stroke adjustment range (mm) -X417 (one side) Adjustment range MY1MW MY1CW -X416 (one side) Adjustment range Slider (Piston yoke) Stroke adjusting unit Bore size (mm) Spacer lengths Spacer length MY1MW MY1CW 5.6 to 11.2 6 to 12 11.5 to 23 12 to 24 16 to 32 20 to 40 25 to 50 11.2 12 23 24 32 40 50 5.6 6 11.5 12 16 20 25 11.2 to 16.8 12 to 18 23 to 34.5 24 to 36 32 to 48 40 to 60 50 to 75

AFF

AFF8B AFF11B AFF22B AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

High Power Cylinder:

24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 Eff. thread length 15.5 19.5 19.5 21 JC 43 39 36 32 H1 5 6 6 8 LH 25 28 30 35 H 44 48 51 54.5 LD 7 7 7 9 K 5 5.5 5.5 7.5 JD 30.5 25.5 28.5 23 H2 8 8 9 11 Bore (mm) 20 25 32 40 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 LZ 55 55 60 75

CE2

x 1.5 1/4 66 11.2 52 326 58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD ZZ Y X LX LS LH B Bore size (mm) 40 50 63 80 100 9 309.5 13 27 42 272.5 40 58.5 9 333.5 13 27 50 289.5 45 68.5 11.5 362 16 34 59 322 50 83 13.5 415 16 44 76 372 65 100 13.5 432 17 43 92 386 75

ML2B

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.