Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: W/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 1 Output, Option 1: W/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 2 Outputs, Option 1: W/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: W/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: W/Unit Display Switching Function, Option 2: None, Option 3: Operating Manual Booklet+Calibration Certificate, X Options: -

Size: 1/8, Thread: NPT, Port Size: 1/4, Accessory: None, Attachment: Check Valve, Option 1: None, Option 2: C [Bowl Guard (Size 2000 Only)], Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F

Size: 1/8, Thread: NPT, Port Size: 1/4, Accessory: None, Attachment: Check Valve, Option 1: Nylon Bowl, Option 2: C [Bowl Guard (Size 2000 Only)], Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F

Size: 3/8, Thread: NPT, Port Size: 1/4, Accessory: None, Attachment: Check Valve, Option 1: Metal Bowl w/Level Gauge, Option 2: None, Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F

Specifications: None, Display Pressure: -100 to 0 kPa, Connection Thread: NPT 1/4, Option: None, Attachment: Clear Cover w/o Protrusion, is not Removable

AC Servo Motor Driver (Pulse input type/Positioning type)

7) 0V [1] Power supply input terminals, L1 and L2: Specify power supply to input terminals L1 and L2. [2] Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

Output block / Power block

[mm] 115.2 136.2 157.2 178.2 199.2 220.2 241.2 262.2 283.2 304.2 L3 [mm] 111.7 132.7 153.7 174.7 195.7 216.7 237.7 258.7 279.7 300.7 L4 [mm] 106.8 127.8 148.8 169.8 190.8 211.8 232.8 253.8 274.8 295.8 -46No.EX-OMH0025-C Dimensions when EX500-Q02 is used L dimensions n 1 2 3 4 5 6 7 8 9 10 L1 [mm] 83 104 125 146 167 188 209 230 251 272 L2 [mm] 72 93 114 135 156 177 198 219 240 261 L3 [mm]

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

VSA4

equation M = 0.66n + 0.75 (kg) n: Station VVSA430N Dimensions (mm) n L L2 256 L1 214 2 stations 326 284 3 stations Pilot hole 396 354 4 stations 466 424 5 stations 70n + 116 70n + 74 n stations VSA4130, VSA4230 VSA4330, VSA4430 Applicable valve 4-10.5 mounting hole Manifold weight general equation M = 0.87n + 0.95 (kg) n: Station VVSA440N Dimensions (mm) n L L2 307 L1 257 2 stations 394

E-P HYREG ® Series VY1 1

Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

Ejector Valve Unit Series ZYY/ZYX 1

= 125 mm L3 = 108 mm L4 = 13.75 mm U side D side Solenoid valve Supply/Exhaust block Ejector valve End plate assembly L End plate assembly R L4 DIN rail 5.25 5.5 8 16.5 16.5 27 16.5 10.5 L3: Manifold overall length L2: Mounting screw length L1: Rail overall length 13-8-20

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

-L1) Width at closing (mm) (L1) Width at opening (mm) (L2) Weight (g) Model 11221122112211221122112211221122112211221122112211221122112211221122112260 72 94 112 84 126 92 134 172 114 186 340 405 485 660 870 20 40 60 30 60 MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 10 40 60 L1 16 40 L2 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 MHL2-16D2 MHL2-20D MHL2

AC Servo Motor Driver (SSCNET Type)

[1] Power supply input terminals, L1, L2: Provide specified power supply to input terminals L1 and L2. [2] Connect the motor input terminal (U, V, W) to the driver power terminal (U, V, W).

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.