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3 !1 o !4 !2 !0 !3 Construction Construction Construction 20, 25 32 to 63 20, 25 32 to 63 20, 25 32 to 63 Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters Actuators Modular F.R.L.

3 Port Solenoid Valve Series SYJ300/500/700

(For details, refer to page 8.) 3 Series SYJ300 Construction (A) 2 (A) 2 N.C. N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

SI unit (CC-Link compatible)

EX260-SMJ is a remote I/O station (1 station occupied, 32 inputs/32 outputs). An example of when the SI unit station number is set to 01 is shown below.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

3-8H10 depth 5 11.5 20 67 90 (T-slot pitch) 45 9.4 62 8-6.6 92 4.5 10 58 30 Stroke + 216 18 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

EXxx-OMN0035CN

EX600-DX B M12 (5 )4 8 C M8 (3 )8 8 P PNP C1 M8 (3 )8 8 N NPN D M12 (5 )8 16 E D-sub (25 ) 16 F (32 ) 16 M12 (4 ) EX600-DXB No. 1 LED 2 () 3 4 5 () -17No.EX-OMN0035CN-A EX600-DXC No. 1 LED 2 () 3 4 5 () EX600-DXD No. 1 LED 2 () 3 4 5 () -18No.EX-OMN0035CN-A EX600-DXE No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () EX600-DXF No. 1 LED

Multi-Axis Step Motor Controller

Wire color 1 Orange (Black 1) 6 Orange (Black 2) 11 Orange (Black 3) 16 Orange (Black 4) 21 Orange (Red 1) 26 Orange (Red 2) 31 Orange (Red 3) 36 Orange (Red 4) 2 Gray (Black 1) 7 Gray (Black 2) 12 Gray (Black 3) 17 Gray (Black 4) 22 Gray (Red 1) 27 Gray (Red 2) 32 Gray (Red 3) 37 Gray (Red 4) 3 White (Black 1) 8 White (Black 2) 13 White (Black 3) 18 White (Black 4) 23 White (Red 1) 28 White

OMU0023

0 execution error: Data 15 B 000B) 16 0 Alarm 3 17 0 Alarm history 3 (Origin parameter 18 0 error: 0006) 19 6 20 0 21 0 Alarm 4 Alarm history 4 (No alarm: 0) 22 0 23 0 Calculated 24 value Checksum(LRC) 25 Calculated value 26 End code CR 27 LF (iii) Irregular response Example 1 Start code 2 ID 0 3 1 Controller ID: 1 4 Function code 8 5 3 Function code & MSB + 1 = "83h" 6 Error code 0 7 1

Fieldbus system DeviceNet TM compatible SI unit

m PCA-1557772 M8 (3 pin), Straight 3 m -80No.EX-OMN0030-D Revision history A: Modify an error in writing.

EXxx-OMN0027CN

4 3 2 1 0 Byte 0 0 Bit No. 0 1 1 1 2 1 3 1 4 1 5 (0) 6 1 7 1 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No. 0 1 1 1 2 (1) 3 1 4 1FREEZE 5 1SYNC 6 (0) 7 1 3 7 6 5 4 3 2 1 0 Byte 2 0 0 0 0 0 0 0 Bit No. 06 (0) 7 1 PROFIBUS DP Byte 3 PROFIBUS FFh ID Byte 45 IDEX600-SPRA ID 1411h -72No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 6 0 0 0 0 1 1 0 1 Bit No. 07 0Eh(13 ) System diag.1 7 6 5 4 3 2 1

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread Model 5 32 1 4 5 16 " " " " 3 8 Male connector KSH 10-32 UNF KQ2 1 8 NPT KQB2 NPT 1 4 KS KX KS KX NPT 3 8 KM Male elbow KSL 10-32 UNF KF NPT 1 8 M NPT 1 4 H/DL L/LL NPT 3 8 KC KK Precautions KK130 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

AZ1000

Other than above: 3%F.S.

EXxx-OMN0029CN

01h0Ah 3 77h 01h0Ah TM2 DeviceNet 3 78h 01h0Ah 3 (1) 79h7Fh 01h0Ah 3 (2) 83h8Ah 01h0Ah 1Quick Connect(Attribute 0Ah) 2 3 2 2 02h3 2 03h 0 1 2 3 4 5 AXA DYB DYB DXB DXD SDNA SI (32 ) 2 01h 01h 02h 01h 02h 01h 3 01h 02h 03h 04h 05h 06h -65No.EX-OMN0029CN-D Map (Class65h)[DeviceNet TM1] Instance Attribute Access Name Type Description/Value 01h 64h Get Input Data Size UINT 65h Get Output

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

EXxx-OMQ0015CN

: EX600-SPN (32 coils Status) ---4 4 (1) (2) (3) (4) -61No.EX-OMQ0015CN (1)[HW Config]EX600-SPN#[Configuration table][ ][Properties] (2)[Parameters] (3)[Value] (4)[OK]PLC (1) (1) (2) (2) (3) (4) (3) -62No.EX-OMQ0015CN FSU(First Start Up) EX600FSU FSUPLCFSU PLC (1)[HW Config]EX600 PLC PROFINET [Properties] (2)[Options] (3)[Connection][TP 100Mbps full duplex] (4)[Disable autonegotiation]

A

3000 4 4000 5 5000, 6000 Model Port Size Exh Port A B C D E F G H L O C K I N G O P T I O N NVHS2500 1/8, 1/4 1/8 60 20 12.8 40 44 33 28 7.5 0 Standard 5 Lockable NVHS3500 1/4, 3/8 1/4 73 29 12.8 53 53 42 29 7.7 NVHS4500 1/4, 3/8, 1/2 3/8 85 32 12.6 70 64 49 36 10 NVHS5500 3/4, 1 1/2 136 56 32 90 80 65 54 10 I N P U T P O R T S I Z E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 H A N D L E C O

Air Pilot Operated

(4) N\6A 4 0 34 01 = Mounted on Individual Subplate 3/8'NPTF Sid Ports (5) 02 = Mounted on Indivldual Subplate 1/2" NPTF Side Ports (5) 52 = Mountad on Individual Subplate ' 1/2' NPTF Side Ports (5); 10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate 3/8" NPTF Side Ports (5); Bottom Ports (5) 3t = Mourted on Stacking Manifold Block.3/8" NPTF Side Ports (4) a3 = Mounted on Stacking

Air Pilot Operated Series NVSA

(4) N\6A 4 0 34 01 = Mounted on Individual Subplate 3/8'NPTF Sid Ports (5) 02 = Mounted on Indivldual Subplate 1/2" NPTF Side Ports (5) 52 = Mountad on Individual Subplate ' 1/2' NPTF Side Ports (5); 10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate 3/8" NPTF Side Ports (5); Bottom Ports (5) 3t = Mourted on Stacking Manifold Block.3/8" NPTF Side Ports (4) a3 = Mounted on Stacking