SMC Corporation of America
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C A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

Catch the hook of the DIN rail bracket on the (b) side on the DIN rail. 2. Push side (a) onto the DIN rail and tighten the clamp screw.

1 4/5 Port Air Operated Valve Series VSA420 Model Flow characteristics P A/B A/B EA/EB Valve model Port size Rc Note) Weight (kg) Body size Pilot port size Function SA C [dm3/(sbar)] 4.2 5.1 5.6 4.2 5.1 5.6 4.1 5.0 5.4 4.3 4.7 5.1 C [dm3/(sbar)] 4.1 5.9 6.5 4.1 5.9 6.5 4.0 6.0 6.6 4.0 5.8 6.4 Cv 0.95 1.3 1.5 0.95 1.3 1.5 0.95 1.4 1.5 0.96 1.3 1.5 b 0.30 0.30 0.33 0.30 0.30 0.33 0.31 0.28

Description Material q w e r t Solenoid coil IN Armature assembly Stainless steel, HNBR, PPS Return spring Stainless steel O-ring HNBR Body Aluminum Bracket Assembly Dimensions J 1.5 A C 4-6 B D Valve mounting screws 2-H Valve mounting hole Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D H J Assembly part no.

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

B 23.5 A 7.0 B A 10.5 (13.0) B Bore size 50 63 80 23.5 19.5 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) The values inside ( ) are for the D-A96/A96V.

Single clevis MUC25SMU25, #5 (#1+#5+#11) MUC32SMU32, #5 (#1+#5+#11) MUC40SMU40, #5 (#1+#5+#11) MUC50SMU50, #5 (#1+#5+#11) MUC63SMU63, #5 (#1+#5+#11) 2.4-5 Plate Cylinder/Double Acting Double Rod Series MUW 20, 32, 40, 50, 63 How to Order Standard MUW B 25 30 D M MDUW B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches 2 1 n Double rod S n Mounting B L F Basic Foot

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when workpiece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when workpiece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the workpiece for a few times. The optimum values will be set automatically.

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

A B Easy manual unlocking Locked Unlocked Locking direction can be selected. Extension lock B A W Retraction lock W A B Various mounting brackets to accommodate wide range of applications.

Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.

ST Edition B Added centralized lead wire. Added the AR-B series regulator (control unit). Added AC type 2 port solenoid valve (control unit). Number of pages increased from 16 to 24. US Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

+ Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23 19.5 6 6 23 4 21.5 M3 x 0.5 26 1.5 5 3.5

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

B 45 1.0 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Made to Order Made to Order Connections inch inch A B Material (mm) (mm) Products such as three port dual valves can be made with monoblock configurations.