/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer Standard Type Series AN00 How to Order Over 30 dB (A) noise reduction Low back pressure Compact and easy mounting AN 400 04 Port size Thread type Body size 02 03 04 06 10 12 14 20 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 R NPT Nil N 200 300
No. of connecting tubes Model Weight Color of release button KDM10-23 KDM10-04 KDM10-06 KDM10-08 KDM20-23 KDM20-04 KDM20-06 KDM20-08 3.2 4 6 300 g 10 520 g 8 3.2 Blue 520 g 4 6 8 20 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.
(not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F.S. or less 1.0% F.S. or less 1.5% F.S. or less Accuracy (to display value) (25C) Output current: 4 to 20 mA (within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 Linearity: 0.2% F.S.
06 50 44 3/4 Middle 0.85 to 2.36 9 18 IS 60 53 3/4 Short 1.04 to 2.83 11 22 60 55 1 Short 0.56 to 1.67 10 20 ZSM 100 90 1 1/4 Short 0.57 to 1.67 17 34 PF2 160 140 1 1/2 Short 0.63 to 1.95 26 52 140 125 2 Middle 0.34 to 1.06 23 45 IF IF31-10 280 250 2 1/2 Middle 0.41 to 1.29 45 90 Data 250 220 3 Middle 0.26 to 0.81 40 80 550 480 4 Long 0.33 to 1.05 85 170 Long 1,000 870 5 0.37 to 1.24 150 300
mm lead wire H Grommet, 600 mm lead wire L L type connector w/ plug and 300 mm lead wire LO L type connector w/o plug and lead wire LN L type connector with plug and pins M M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation
double 2 position double 2 position double 3 position (B) 2 (A) 4 (B) 2 (A) 4 Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single Pilot pressure range (MPa) 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position Ambient and fluid temperature (oc) Max.60 3 position closed center 3 position closed center Lubrication Not required (B) 2 (A) 4 (B) 2 (A) 4 Mounting position Free 300
590 271 561 242 532 213 503 184 474 155 445 126 416 97 387 68 358 39 329 337.5 625 300 587.5 275 562.5 250 537.5 212.5 500 187.5 475 162.5 450 137.5 425 100 387.5 75 362.5 348 635.5 310.5 598 285.5 573 260.5 548 223 510.5 198 485.5 173 460.5 148 435.5 110.5 398 85.5 373 298.8 588.8 269.8 559.8 240.8 530.8 211.8 501.8 182.8 472.8 153.8 443.8 124.8 414.8 95.8 385.8 66.8 356.8 37.8 327.8 4.3
Valve Series VH Standard Specifications SlA VlA Fluid Air Standard specifications 1.5MPa Max.operating 1.0MPa VH200, 300,400 pressure 0.7MPa VH600 SlA 5 to 60C (No freezing) Ambient and fluid temperature VlA Operating angle 90 VH600 Lubrication Not required/When lubricated, use turbine oil # 1 (ISO VG32) Optional Specifications VH300 VH410 VM/VR VH210 VH Bottom piping VH300, 400 VH200, 300
N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..
Long 3t|oke Doubb *ting SlrEi rodl 25 to 300 @Body options @Auto switcrr See catalog N320 for available auto swilches.
Port size: (inch) Output specification 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Symbol 1 2 Specification PF2D200/300 series PF2D300 series Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.
SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model
Lubrication Not required VFA Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) VFRA Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.
rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle
or less 180 or less 0.8 1.4 100 90 20 14 13.2 Response time (1) (ms) VFN Max. operating frequency (c.p.m.) (2) DC AC DC AC 1.6 2.4 300 360 50 60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.
mm) MN: Without lead wire L: With lead wire (length 300 mm) G: Lead wire length 300 mm + + + + W: With connector cable Note 1) LN: Without lead wire LO: Without connector MO: Without connector H: Lead wire length 600 mm + + Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached.
(With gasket and screws) Body option Electrical entry M: Main/Pilot valve common exhaust type 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Manual override Grommet L plug connector M plug connector M8 connector M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) G: Lead wire length 300 mm MN: Without lead wire WO: Without connector cable Nil: Non-locking push
Electrical entry 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Grommet L plug connector M plug connector M8 connector E: Push-turn locking lever type G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without connector cable CE-compliant +Nil Q +CE-compliant Note) CE-compliant: For DC only. + + H: Lead
Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire
Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) MG 15, 32 CX DSpecifications -X 15 32 Bore size (mm) 20Atmosphere to 1.3 x 10-4 Pa (ABS) Operating environment pressure Air/Inert gas Operating atmosphere Data Air/Inert gas Fluid