10m 1.5 1 1.5 1 A A m 1000 10 00 mm 1000 15m 15m 3m 3 3 B B 3 20m 20m 5 5m 5 C C 5m 100 100 200 200 300 300 500 500 600 600 700 700 400 400 800 800 900 900 1000 1000 LEFS16 LEFS16 LEFS25 LEFS25 ( R R LEFS32 LEFS32 S S LEFS 40 LEFS 40 LEFB 25 T 6N 1 1 5 00 DIN /O 16 16 25 25 32 1.5m 1 32 1 3 3m 3 5 5 5m ( DC24V ( DC24V A A NPN NPN 6N LECP6/LECA6 6N LECP6/LECA6 ( PNP
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
d Mounting position R Left Note 1) A semi-standard product can be selected alphabetically (a to d).
pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1
CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.
Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External
4) Connector (Option) 1 CH 2 3 4 r Pin no.
P FR* FP Functional option Adjuster option Without option With buffer With end lock Axial piping With buffer, end lock With buffer, axial piping F R P FR FP Note 1 Note 1 Note 1 AS AT X X X X Note 1 A X X X X End lock option is not available for MXS6.
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
digit Hysteresis mode Hys teresis 0 to variable 1 Window comparator mode Output voltage (rated pressure range) 1 to 5 V 2.5%F.S. 0.6 to 5 V Analogue Voltage output 2.5%F.S. output Linearity 1%F.S.
Allowable Clamp Arm End Load , 1 2 1 1 Refer to the following figure regarding weight of parts mounted on the clamp arm. (Note 1) This weight does not include that of the clamp arm.
center SMC 5 3 position pressure center Dual body type (double/3 position) Pilot type Internal pilot External pilot Nil R Manifold SS5Y3-45GD-05U-C6 Rated voltage SS5Y3-45GD-05U-C6 . 1 set (manifold part number) SY3140-5FU . 3 sets (single solenoid part number) SY3245-5FU . 1 set (double solenoid part number) 5 24VDC Manual override Nil Non-locking push type D E Slotted locking type Knob
M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.
) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50
DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(
--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:
6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female
steel 4 11 Belt separator Special resin 2 46 Diaphragm NBR 2 12 Guide roller Special resin 1 47 Brake body Aluminum alloy 1 Hard anodized 13 Parallel pin Carbon steel 1 48 O-ring NBR 1 14 Seal belt Special resin 1 49 Slide table Aluminum alloy 1 Hard anodized 15 Dust seal band Stainless steel 1 50 Sensor body Aluminum alloy 1 Chromated 16 Belt clamp Special resin 2 51 Connector gasket NBR
-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-