/N.C.), 3rd Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 3rd Selection Quantity: 1, /: /, 4th Nominal Nozzle Size: 4 (ø1.5), 4th Selection Supply Valve and Release Valve: K (N.C./N.C.), 4th Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 4th Selection Quantity: 1

ZPT/ZPX

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

NCM-A

operating pressure 250 PSI/1.7 MPa Minimum operating pressure 8 PSI/0.06 MPa Ambient and fluid temperature 40 to 140F / 5 to 60 C Piston speed 2 to 30 in/sec (50 to 750 mm/sec) Lubrication Not required (Pre-lubricated at Factory) Mounting B, C, E Standard Stroke (inch) Mounting Max. stroke as standard Long stroke Standard stroke 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4

VG300-OMI0003

No. 2 2 1 DIN DIN DIN DIN 1 1) X 1/8 2)X 1.PE 2.X PE 3.

D. P. Lube ALD600/900 Series

1 1 1 B P 1 4 1 2 2 1052 D.

XLAQ/XLDQ

Atmospheric pressure to 1 x 10-6 XLDQ Prevents turbulence of particulates. Prevents a pump from running overloaded.

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

3 Port Solenoid Valve SYJ300/500/700 Series

Valve Valve Base Base Base A port specifications Direction Top Top Bottom Bottom Side 1/4 NPTF 1/8 NPTF 1/8 NPTF 1/4 NPTF 1/4 NPTF P,R port 1/8 NPTF 1/4" onetouch fitting 1/8NPTF 1/8NPTF 1/8NPTF 1/8NPTF N7T Port size A port 5/16" onetouch fitting N9T X port Note 1) M5 0.8 M5 0.8 M3 0.8 Body ported type SYJ7 2/SYJ7 2R 10.6 (0.59) Note 2) Valve effective area mm2(Cv) 1/8:9.2 (0.51) N7T:8.8

CVRA1-E

Tighten with the cross recessed round head screw. (6) Mount the tube gasket 11 to the left cover 2 to mount to the body 1 .

Safety Instructions

Tightening the threaded portion of an M3, M5 or M6 fittings 1) M3 First, tighten it by hand, then give it an additional 1/4 turn with a wrench. 2) M5 and M6 First, tighten it by hand, then give it an additional 1/6 turn with a wrench. Mounting Caution 1. Check tubing for damage before installing. Confirm model size, etc. 2.

VFRA3000

VFRA4111-04 VFRA4211-03 VFRA4211-04 VFRA4311-03 VFRA4311-04 VFRA4411-03 VFRA4411-04 VFRA4511-03 VFRA4511-04 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 13 15 14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/

Clean Gas Filter

Regarding the TSJ fittings, after tightening the nut by hand, add another 1 1/4 to 1 1/2 turns with a wrench to seal the fitting. In case the fitting is re-installed after filter replacement, first tighten the nut by hand and add another 1/4 to 1/2 turns for sealing. Use the following parts as piping and fittings.

LA-OMT0056

Description Quantity Note 1 Card Motor 1 pc. 2 Actuator cable 1 pc. 3 Card Motor controller 1 pc. 4 Power supply plug 1 pc. Included with controller 5 Counter plug 1 pc. Included with controller 6 Controller setting sofrwareNote1) 1 pc. 7 Controller setting cable Note2) 1 pc.

SGC200-OMJ0004

4) 4) , , , , 1)-10-20 2) 1) 1) 1) 1) 50mm 2/s 2) 2) 2) 2) 3) 3) 3) 3) 4) 5), 6) 4 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 4550 Rc1 6570 , , , , 1.5~2 1) 2) 3) 2 5 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / 30 1 1) 2)1 0.1MPa

Pressure Sensor

(with extension analog output range) Linearity 1%F.S. Repeatability 1%F.S.

IC

0 IC-0(Built-in sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 cores, O.D. 6.8 mm, 1 m length Cable for 4 point switch output 5 cores, O.D. 6 mm, 1 m length q q Pneumatic regulator connection cable 3 cores, O.D. 3.4 mm, 1 m length Cable for external sensor Note 1) Keep

Manifold block ISO size 1, Applicable solenoid valve: VQ7-6, Number of stations: 1-10, Wide range of interface options, EXH. RELOCATION BLK ISO 1, VALVE, VS7-6 SOL VALVE 4/5 PORT, 22, VS7-6, .66446 lb

AS

(Metric size) ASV 4 6 6 10 8 4 Flow rate [L/min (ANR)] It may damage the body A or fittings.

Clean Exhaust Filter SFE Series

Max. ow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch tting type Specications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum ow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating Note

Size 1, ISO standard solenoid valve , Fluid: air/inert gas , Operating pressure: 0.15 to 1.0MPa, Enclosure: IP65 (dusttight, splash proof)??, VS7-6 BASE MT 1/4, VALVE, VS7-6 SOL VALVE 4/5 PORT, PE, VS7-6 BASE MT 1/4, 0.99208 lb