High Precision Filter for Liquids FGH Series

2 m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

FHM

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

ChemicalThermo-con Series HED SEMI

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Port size: (inch) Output specification 11 13 19 PF2D504 PF2D520 PF2D540 3/8 1/2 3/4 Specification PF2D200/300 series PF2D300 series Symbol 1 2 Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

Nil H L S Select from Series IDG Flow direction (Right m Left) 500 15 300 Note) In the case of two or more options, indicate them alphabetically. 170 240 300 110 75 40 50 100 150 60 Accessory Thread type Symbol Type Symbol Type None (Standard) Nil B Rc Nil N F With bracket NPT Note) When symbol B is indicated, a bracket assembly with a part number shown in the table left below is included

SYJ300

For sub-plate type, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

VEX1

mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 1 4 1 4 02 3 03 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal 1 4 1 2 D DIN terminal 1 2 G Grommet (Lead wire length 300 mm) Grommet (Lead

0.1% F.S. or less, Enclosure: IP40, PSE200/300/530-560 OTHER SIZE, INSTRUMENTATION, PSE200/300/530-560, 1X, PSE200/300/530-560 OTHER SIZE, 0.57251 lb

0.2%F.S. or less, Enclosure: IP40, PSE200/300/530-560 OTHER SIZE, INSTRUMENTATION, PSE200/300/530-560, 1X, PSE200/300/530-560 OTHER SIZE, 0.16034 lb

JXCx-OMU0024

For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

SFOD-OMT0012

For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

ZL3-OM00801

[L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [

IDX-OM-U022

. / 3.8 2A 80VA 100W DC5V,2mA IDFA100F150F 3 4 3.8 IDX-OM-U022 4. 4.1 5 310 4.2 4.2.1 () 300 300 4.2.2 IDFA100F150F 4 1 4.1 IDX-OM-U022 4. 501015 ( ) ,0 IDFA100F150F 4 2 4.2 IDX-OM-U022 4. OFF 1. 2. 3. 5 4 4. (4 ) () O 5. O 6. O O 7. 3mm ) 8. 4 5Nm 9. ADH-E400 1 IDFA100F150F 4 3 4.2 IDX-OM-U022 4. 4.2.3 V ON 1. 2. 3. 4.

AMX-OM-Q015E

500 25 50 100 200 300 500 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V) Relief type Port size 1/8 1/4

AMX-OM-Q018E

500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V)

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

Digital Pressure Switch

Max. lead impedance: 300 (at power supply voltage of 12 VDC) Load impedance 600 (at power supply voltage of 24 VDC) Min. lead impedance: 50 Analog response time 20 ms Input type Non-voltage input: 0.4 V or less, Current consumption: 5.5 mA or less External input Input mode Zero-clear 5 Input time 30 ms or more -75No.PS-OMX1005 Product No.

PSxx-OMU0005CN

(19 (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300

PSxx-OMU0008CN

12 V 300 24 V 600 DC(-) 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -23No.PS-OMU0008CN-D [] 3 0.2 [] / / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (63 ) (3 ) () () (26 ) (28 ) (30 ) 3 () 3 -24No.PS-OMU0008CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20C [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [