HRX-OM-R028

Table 6.3-3 List of set values Set values Explanation Initial value (Default setting) Setting/checking are not available if the setting of the changing of communication error is OFF. to Sets monitoring time of communication error Setting range is 30 to 600 sec. 6.3 Setting and checking HRSH Series 6-4 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

HRX-OM-W069

Error Operation stops during alarm By default 1 : Time from communication error to alarm occurrence (monitoring time) 4.2 Communication alarm reset HRL Series 4-2 Revision Rev A : Jan 2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

HRX-OM-Y120

D JAN 2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

HRX-OM-Z015

Refer to 3.6 Setting method. 4.2 Communication alarm reset HRLE Series 4-2 Revision Revision B:[Jul. 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HRX-OM-X010

HRZ Series Product Warranty 9-1 Revision Rev.EMay.2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HRX-OM-Z018_E

AJuly 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HRX-OM-Z039_E

AJuly 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HEC_W-E

*Therefore, moisture in the air starts to condensate when the air temperature becomes lower than this temperature. 10-3 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016 SMC Corporation

DOC1003077

(Temperature control and 1 12 E pump/fan operation enabled) A Display/Operation panel G Power supply connector SET2: Communication Setting Mode B Reservoir Cap H Alarm, RUN/STOP, Communication connector 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice

Air cooled Thermo-con (Compact type)

HEF002-A6 4-1 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

HEC-OM-Y008

I K SV C L D E A Display/Operation panel G Main power switch B Reservoir Cap H Power supply connector C Level gauge I Communication connector 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC

Air cooled Thermo-con (Compact type)

INR-244-831 4-1 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 18 XL-OMV0017 Revision history 1st printing: VZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved 19 XL-OMV0017

XLA Series

Insert the cover. 15 XL*-OMI0009-E Revision E Precaution for mounting added. 2018.9 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 16 XL*-OMI0009-E

XLA- ∗ -F7NJ ∗ - ∗ Series

Insert the cover. 14 XL*-OML0013-B Revision history Safety Instructions PQ Limited warranty and Disclaimer SR 1st Printing :MP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All

XL-OMV0002

-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540 50,63,80,100,160 O O 50 O ( ) 3 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O ,O , 14 XL-OMV0002 VR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Insert the cover. 13 XL-OMO0001-A Revision history Limited warranty and Disclaimer SR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 14 XL-OMO0001-A

XL-OMY0002

3 O 4 1 M O M O O O O O O 4 5 O S M XLD-25 S XLD-40,50,160 S XLD-63,80,100 S S 25 4050160 O S 18 XL-OMY0002 6 7 c Nm c O XLD-25 0.360.1 S XLD-25 0.630.1 O S S 0.3MPa S c c O O O O O 8 3 b b Nm a Nm 1 2 4 XLD-25 1.5 0.3 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 a M M0.2MPa b b O a 19 XL-OMY0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

XLDV Series

(Ensure there is no fiber or dust on it.) 1(P) SUP 13 XL-OMM0005-A Revision history Safety Instructions P P P Po o o o 1st Printing :NQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation

XLGR Series

Perform final torque with same numerical order. 18 XL-OMP0001 Revision history 1st Printing :PR 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation All Rights Reserved 19 XL-OMP0001