Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

Vacuum Saving Valve

Relationship between Minimum Operating Flow and Fixed Orifice Size 50 40 M8 0.5 5.0 Connection thread size for the pad Fixed orifice size (mm) Minimum operating flow (l/min (ANR)) Q2 30 N = 6 (unit) 20 10 0 5 10 15 20 25 30 35 Q1 = 31 l/min (ANR) Suction flow (l/min (ANR)) The above selection example is based on a general method under the given selection conditions, and may not always be

Vacuum Pad

M-5AU-6-X83 [Weight: 1.8 g] 2 KJH06-M5 [Weight: 3.3 g] 2 Note 2) The symbol "" indicates buffer type "J" or "K". 1 Refer to "ZP3-YUM: -B5" for dimensions. 2 When calculating the weight, add the weight of the fitting to "ZP3-YUM: -B5". 35 With Buffer: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Flat with groove Pad type Dimensions/With Buffer: Vacuum Inlet Lateral 15, 20 mm Stroke

NCA1

/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2.19 1 1 3 1/2 1.18 5 1/2 3.39 1 3/8 2.13 3 3/4 2.48 3.37 5 1/4 325 (3.25) 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 2.76 1 1 4 1/2 1.34 6 1/2 4.33 1 5/8 2.59 4 1/4 2.72 3.95 6 5/64 400 (4) 1 3/8 1-14 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 1 1 5 1/4 1.57 7 1/4 5.12 1 5/8 2.59 4 1/4 2.72 3.99 6 5/64 35

NCQ8

K Auto switch M1 2 sides x 4 places 0.25-counter bore 0.15 depth E A + Stroke 0.13 (Inch) H E D A W Z M1 M2 C Symbol Bore Q P K J I 1/4" to 1"st 1-1/4" to 2"st 3/8" to 2"st 1/4"st 075 (3/4") 106 (1-1/16") 0.46 #10-32UNF #10-32UNF 0.38 1.19 1.75 0.31 1.25 1.56 0.06 0.25 0.86 1.22 0.19 1.31 1.19 0.52 0.70 2.03 1.25 1.88 0.50 1.56 5/16-24UNF 0.16 0.44 1.69 NPT1/8 0.25 1.72 0.56 35 Series NCQ8

CRB2/CRBU2/CRB1

270 270 Rotation Single vane Double vane 47.1 72 142 258 480 140 469 47.5 47 73 72 143 263 255 491 Body of rotary actuator Auto switch unit + 2 switches Angle adjuster 30 30 50 60 46.5 30 47 90 150 203 Rotation 90 90 90 90 90 100 100 100 100 100 Body of rotary actuator 62.2 550 63.2 81 77 151 158 289 308 504 Auto switch unit + 2 switches Angle adjuster 30 30 50 60 46.5 30 47 90 150 203 35

AFF

guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

AME

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) Maintenance space M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70

AMF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) 2-port size Maintenance space M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

NCA1

non-polar DC 3-wire NCM 2 pin 3 pin 4 pin Blue 2 pin 4 pin OUT () 3 pin 1 pin OUT (+) NCA Brown Blue OUT () OUT ( ) DDC () DC (+) OUT Brown Blue Black Diagnostic output DC 4-wire Brown Orange Blue Black OUT DC () DC (+) -X 20Data Connector M8-3 pin/4 pin Unit : mm ( ) : ft Sensor 10 (0.03) 31.4 (0.10) Lead wire length M12-4 pin Sensor 44 (0.14) Lead wire length 14 (0.05) 6-15-35

CJP

DMounting pitch (mm) 6 10 15 Bore size (mm) 20 30 35 -X Use caution not to use them, getting closer than the specified pitch. Otherwise, it may cause auto switch to malfunction. 20Data Mounting pitch Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to page 6-16-1.

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

9200-www.stevenengineering.com Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYP15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYP32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Magnetic holding force (N) Bore size (mm) 15 59 32 268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.2 0.3 0.1 15 53 35

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

the cylinder tube Lubrication Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Theoretical Output (N) Magnetic holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm2) 15 0.1 0.3 0.2 59 15 32 18 53 35

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16 MY3A25, MY3B25 MY3A40, MY3B40 MY3A63

Bore Size: 50 (2"), Stroke, Inch: 35, Stroke, Hundredths of an Inch: 25, Option: X322 (Outside of Cylinder Tube Hard Chrome Plated)

.: 04 (ø4), Actuator Type: 35 [Twist Selector (3 Position)], Suffix: R (Push Button Selector Color Red)

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 35, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.08 to 1.0, Specification: Without magnet, Support bracket: None, Auto Switches: Without auto switch,