High Vacuum Angle Valve, XL Series

A cm Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1D3/L l/sec, at an air temperature of 20C. ON OFF Short pipe conductance From the Clausings factor K and the hole conductance C in the drawing below (Clausings factor drawing), the short pipe conductance CK is easily found as CK=KC.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch

Series SY100 3 Port Solenoid Valve Rubber Seal

Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold. S41 Type How to Order Applicable solenoid valve (1) SS3Y1 S41 05 M3 VQ SY114-l SY114A-l SY124-l SY124A-l Stations A port size M3 M5 M3 X 0.5 M5 X 0.8 VQZ 2 stations 02 ... ...

VDW Series

approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Compact Guide Cylinder

MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5 9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38 11.5 9.5 12.5 11.5

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

SMC Pneumatic Clean Series

40 150 A H7B 21 C D M 2 L 40 150 A H7B Number of auto switches Mounting style Basic style Axial foot style Rod side flange style Head side flange style Boss-cut basic style Boss-cut rod side flange style B L F G BZ FZ 2 pcs. 1 pc.

VZ1000

(Non-locking) 2-2.6 (Mounting hole for manifold) (Mounting screw) 4-M5 x 0.8 (Piping port) 2-M3 x 0.5 depth 8 (Mounting screw) L plug connector (L) VZ1120-L-M5 M plug connector (M) VZ1120-M-M5 DIN terminal (D) VZ1120-D-M5 (Lead wire length) Applicable cable O.D. 3.5 to 7 300 300 (Lead wire length) : With light/surge voltage suppressor 3-3-12 Series VZ1000 Manifold Specifications Manifold

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.

VM

MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM122-M5-00 VM132-M5-00 37.5 VA 1.5 mm O.T. 3.5 VM123-M5-00 VM133-M5-00 2-4.6 mounting hole 33.5 3.0 mm T.T.

Auto Switch Guide

MLU ML1C Auto switch mounting screw M5 x 0.8 x 16 l 1.

V100

port) M5 x 0.8 L plug connector (L): V11 24(A)-L-M5 M plug connector (M): V11 24(A)-M-M5 13.1 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) + 3 Approx. 300 3 (Lead wire length) 39.8 [43.7] Approx. 300 (Lead wire length) + 40.7 [42.9] 30.9 [33.1] 25.9 2 2 Other dimensions are same as grommet type.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MQQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.