Rotary Actuator

(m) r m Fig. (10) Inertia moment This shows inertia moment of m (weight) at r from the rotation axis. Calculation of inertia moment depends on the shape of the object.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Cassette base manifold for SV1000 valve, D-sub connector or flat ribbon cable, Number of connectors (D-sub): 25 pins, Number of connectors (flat ribbon): 26, 20, 10 pins, Maximum 18 stations available as standard, DIN rail mount, MFLD, PLUG-IN, D-SUB CONNECTOR, VALVE, SS5V1 MANIFOLD SV1000, US, SS5V1 BUILT IN

PSxx-OMF0005CN

-2No.PS-OMF0005CN-E / 1 1.5 *3) 1 1 [] -3No.PS-OMF0005CN-E () () -4No.PS-OMF0005CN-E () * 5 m -5No.PS-OMF0005CN-E * (RcNPTG) 1/8 79 Nm 1/4 1214 Nm 1.52 2 * () ()() () () -6No.PS-OMF0005CN-E * IP66IP65 () 060 (5 ) * -7No.PS-OMF0005CN-E (ISA2 ) * * (EXH) 5 m 0.2 MPa CE (2 VCA ) () C-R () ()C-R ( ) () AC 10 DC 2 * * 2 0.51.25 mm -10+10 5 -8No.PS-OMF0005CN-E *

EX250-SPR_eng

Side D Side U (SI unit side) Communication connector Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories M12 5-pin Plug A-code 7 5 7 5 Bit No. 1 1 1 3 No. Description Function Valve manifold 2 3 SV24 V 1 +24 V for valve : Output numbers are assigned to stations from side D to U of manifold in order.

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

Large Type Vacuum Unit Series ZR

10 2 10 2 23 PS PE Note) 1 indicates the dimension when bracket A is mounted.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Vacuum Saving Valve

D-DN This catalog is printed on recycled paper with concern for the global environment.

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

IDX-OM-X004

air at the time of 20 oC (The saturation temperature: 10 oC) [ Air Dryer has been set up on the first side ] ID Series 6-1 Specifications 6 1 IDX-OM-X004 Heatless Air Dryer 6 References 6-2 Externals dimensional drawing Tube Size related to installation Bracket connection Model A B C D E Part No.

ASx-OMZ0085

Connection thread size Maximum number of rotations of the indicator M5, 10-32UNF 8 rotations 1/8 10 rotations 1/4 9 rotations 3/8 8 rotations 1/2 10 rotations 6 - Caution (1)When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body.

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

Solid State Auto Switch

No.D-S-OMZ0004 PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-M7BA# Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 8 Names 8 Definition and terminology 9 Mounting and Installation 10 Installation 10 Troubleshooting 12 Specifications 15 Dimensions 16 -1No.D-S-OMZ0004 Safety Instructions These safety instructions are intended

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

NVEPA|VEFseies

Specifications )haracterislica vEA130 VEA250 iupply Power 1 10/220V + 10% (50/60H2) DC24V +2V tower Consumption sOVA 29W )utput Current Range 0-0.75A 0-1A mpedance ol E/P rroportional Valve 26-36s2 (0.75AF.S.) 13-18.5() (1A F-S.)

3M/SMseries

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12