High Precision Filter for Liquids FGH Series

Filter for Liquids FGH Series RoHS FGD How to Order FGE FGG FGH T 100 03 002 J FGA High precision filter for liquids Element seal FGC Symbol T Material PTFE FGF Filtration accuracy Body size FGH FGH Filtration accuracy Applicable for: Applicable body Symbol 002 004 006 013 X20 Element length L117 L246 L496 Applicable element EJ701S EJ801S, ED801S EJ901S, ED901S Symbol 100 200 300 2 m 4 m 6 m 13

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

For other precautions, refer to Fittings & Tubing Precautions on pages 13 to 17. When using the fluoropolymer fittings, refer to the precautions on pages 445 and 446.

Low Maintenance Filter Series FN1/FN4

Lock Bowl and Cover: Stainless steel 304, O-ring: NBR/FKM Material Stainless steel 304 Material Step type Step type Construction Cylindrical type Cylindrical type Cylindrical type 5 m, 20 m 5 m, 20 m 5 m, 20 m 5 m 5 m Nominal filtration rating 0.6 MPa Differential pressure proof 1.8 l (when reservoir is set separately) 6 l 1.1 l (when reservoir is set separately) Reservoir tank capacity 13

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 120) Item 13 * For altitude of 1000 m or higher. 100 A

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Without auto switch: 10C to 70C With auto switch: 10C to 60C (With no condensation) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot bracket Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Stroke length tolerance +1.0 0 50 to 400 mm/s Piston speed Mounting style Grease Particle generation grade (Refer to front matter 13 for details.)

NARM Ser ies

0.05 to 0.7) 23~140F (5 to 60C) (No freezing) Ambient and fluid temperature Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) 1 8 1 8 (80 X n) + 23 Common IN .13

Ionizer IZN10 Series

When using piping materials prepared by the customer, secure a sectional area of a 4 mm inside diameter (approx. 13 mm3 or more) for the air passage of the piping, and if using tubing, ensure a minimum bending radius.

Air Cylinder Double Acting, Single Rod JCM Series ø 20, ø 25, ø 32, ø 40

Refer to pages 11 to 13 for cylinders with auto switches.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 186) Item 13 * For altitude of 1000 m or higher. Note 10) The anchor bolt xing brackets (including 6 M8 bolts) are used for xing to wooden skids when packaging the thermo-chiller. No anchor bolt is included. 166 B

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature stability Note 3) 0.54F (0.3C) Pump capacity Note 4) (50/60 Hz)(MPa) 0.45/0.65 (at 30 L/min) 0.40/0.60 (at 4 L/min) 0.40/0.60 (at 40 L/min) 0.40/0.60 (at 40 L/min) Circulating fluid flow range Note 5)(L/min) 2.4 to 13.2 gpm (9 to 50 L/min) 0.8 to 4.2 gpm (3 to 16 L/min) Tank capacity Note 6) Approx. 3.4 gal (13

ISG

Cable gland Max. diameter of an electric cord 20a 20b 20c 12 13 15 How to Order 3. Terminal thread type is M4. 0 W 1 03 1 0 ISG Mounting/Piping Caution Multipurpose pressure switch 1. Mounting is possible in either horizontal or vertical orientations.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 19, 25 12, 19 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/4, 3/8 3/8, 1/2 3/4, 1 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O. PB B A B A B A Basic size With reducer Note) Applicable fittings for body class 6 is LQ1. N.C. N.O. Double acting Double acting With flow rate adjustment PA PA N.C.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05 07 11 13

ISA3_L

T Bracket 13

Series 10-MGF Guide table ø40, ø63, ø100

Specifications Bore size(mm) Item 40/63/100 1.5MPa 1.0MPa 0.1MPa 10 to 60C (With no freezing) Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed +1.0 0 20 to 200 mm/s mm Stroke length tolerance Grease Particle generation grade Fluorine grease Grade 2 (Refer to front matter pages 13 to 22 for details.) 94

MXJ_New

Since there are applicable auto switches other than those listed above, refer to page 13 for details. Auto switches are shipped together, but not assembled. 4

KV2

Plug-In 90 Elbow Union 90 Elbow Cartridge 90 Elbow 1/4 NPT 35 L 3/8 NPT 36 1/2 NPT 37 3/4 NPT 38 Male Branch Tee Union Tee T Union 00 Male Branch Y Union Y Plug-In Y Plug-In 99 U Cartridge Q SAE 45 Flare S VD Male Double Universal 90 Elbow Y Male Run Tee Tube Size Z Male Branch Universal 90 Elbow 5/32 03 Female Connector F 1/4 07 Female 90 Elbow LF 3/8 11 Female Universal 90 Elbow VF 1/2 13

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Model External Internal Open/Close stroke (Diameter) Port size Lubrication Gripping force N (Effective value at 0.5 MPa) Note 1) Nominal size Weight g Note 2) Action Model Finger opening width (mm) Finger closing width (mm) Stroke (mm) 11221122125 (130) MHR3-10 MDHR3-10 MHR3-15 MDHR3-15 Vacuum suction type 10 7 6.5 16 22 6 M3 x 0.5 Double acting Non-lube 11221122230 (235) 15 13 12 19 27 8

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

Valve mounting screw falling-out-prevention type Internal pilot External pilot Internal pilot External pilot SY30V-16A SY30V-16AR SY50V-16A SY50V-16AR SY30V-16A-1 SY30V-16AR-1 SY50V-16A-1 SY50V-16AR-1 SY3000 SY5000 13