3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

Adsorption Plate

Adsorption force (Theoretical fixing force) W = P x S x K (0.15) x 0.1 W : Adsorption force (N) S : Adsorption surface area (cm2) P : Vacuum pressure (kPa) K : Aperture ratio 0.15 (15%) Do not apply a pressure or load of 0.1 MPa or more to the adsorption surface. Doing so may cause a reduction in flatness, damage, or impact marks.

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

CRB1/Size: 10, 15, 20, 30

R Q2 B P C F(h9) D G1 G2 J K L M N Q1 E(g6) Q3 Model A 90 180 270 M5 M3 CRB1BW10-lS CRB1BW10-lSE CRB1BW15-lS CRB1BW15-lSE CRB1BW20-lS CRB1BW20-lSE CRB1BW30-lS CRB1BW30-lSE 3.4 (5.5) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 0 0.036 15 24 8 0.004 0.012 9 14 3 1 5 9 0.5 29 4 M3 M3 (5) M5 M3 3.4 (6) M3 (10) 0.004 0.012 0 0.043 20 29 9 12 18 5 4 1.5 6 10 0.5 34 M3 M4 (7.5) 4.5

PSE5xx.eng

101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 PSE57# ZS-28-CA-4 2-1473562-4 37104-3122-000FL PSE533 PSE543 PSE563 PSE573 PSE530 PSE540 PSE560 PSE570 PSE531 PSE541 PSE561 PSE564 PSE574 PSE550 Applicable pressure sensor For information about connectors please consult the manufacturers catalogue.

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?

3%F.S. or less (Connected with PF2A2 )?2% F.S. or less (15 to 35C, based on 25C)?3% F.S. or less (0 to 50C, based on 25C)Analog voltage output (non-linear) output impedance 1 k output for display unit PF2A3Voltage output 1 to 5 V (within the flow rate range)Linearity: ?