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Incorrect description corrected on page 12, outside diameter dimension drawing layout changed on page 13. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Name Material Remark 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Handle POM 4 Needle POM 5 End cover Brass Electroless nickel plating 6 Spring Steel wire 7 U-seal HNBR 8 O-ring NBR 9 Needle O-ring NBR 10 Y seal NBR 11 Seal for fitting NBR 12 Cassette 16 Seal NBR For G thread only. 11 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

[January 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2021 SMC Corporation All Rights Reserved No.EX-OMO0007-E

NBR 1 JIS B 2401, P3 O ring NBR 2 IL211 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Note5) The following combinations are available: A+G or B+G F Note6) "J" has a terminal box, but it is non-explosion-proof specifications. 30 12.Attached Drawing D 31 32 33 34 35 36 37 Revision history Revision D 10/ 7/2020 Revision E 25/12/2020 Revision F 25/ 4/2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

JXC-OMT0059-A Jun / 2019 Complete revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013-2019 SMC Corporation All Rights Reserved No.JXC-OMU0030-A

If any of the troubleshooting is not applicable, please contact your SMC sales representative. 8 Dimensions -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation

. -22- Revision history No.LEJ*-OMZ0012 Jun / 2021 First edition 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http: / /www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved -23-

(P.9) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

CE : EMC 2004/108/EC Low Voltage Directive 2006/95/EC UL : UL61010-1 SEMI : S2-0706, F47-0200 9.4.2 When the product is exported, strictly follow the laws required by the Ministry of Economy, Trade and Industry (Foreign Exchange and Foreign Trade Control Law). 9-5 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http

. -60No.EX##-OMU0020-A Revision history A: Contents are added [September 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017-2020 SMC Corporation All Rights Reserved No.EX##-OMU0020-A

Revision history Rev.BApr.2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

[August 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2018 SMC Corporation All Rights Reserved No.PF-OMS0002-B

IZ*-OMT0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 22 -

The relation between the shim depth Adjust the shim properly. and the clamp force is not correct. 35 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights

[January 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2019 SMC Corporation All Rights Reserved No.PF-OMO0012-E

Rod end nut Steel 2 6 Mounting nut Brass 1 Electroless nickel plated 5 Snap ring Tool steel 1 Phosphate coated Aluminum alloy 1 16Chromated 4 Piston Brass 1 10 3 Piston rod Stainless steel 1 Aluminum alloy 1 16Chromated 2 Head cover Brass 1 10Electroless nickel plated 1 Body Aluminum alloy 1 Hard anodized No Description Material Qty Note 31 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

deterioration Select the appropriate model due to fluid Freezing Take measures to prevent freezing Piping condition Piping check External leakage Packing defect (O-ring) Replace the product Swelling and deterioration Select the appropriate model due to fluid Parts break Replace the product Freezing Take measures to prevent freezing 16 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

power supply is inrush current suppressor type thrust does Voltage drop Temporary voltage drop in the power supply. not reach the thrust setting value. 30 - Revision history 1st printing: Revised in May 2012 A: Revised in November 2012 B: Revised in April 2013 Addition to note Correction of words Correction of timing chart C: Revised in November 2015 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

OMW0001 13 No.VQ7-6-OMW0001 14 No.VQ7-6-OMW0001 15 No.VQ7-6-OMW0001 16 No.VQ7-6-OMW0001 17 No.VQ7-6-OMW0001 18 No.VQ7-6-OMW0001 19 No.VQ7-6-OMW0001 20 No.VQ7-6-OMW0001 21 No.VQ7-6-OMW0001 22 No.VQ7-6-OMW0001 23 No.VQ7-6-OMW0001 24 No.VQ7-6-OMW0001 25 No.VQ7-6-OMW0001 26 No.VQ7-6-OMW0001 27 No.VQ7-6-OMW0001 28 No.VQ7-6-OMW0001 29 No.VQ7-6-OMW0001 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101