Air Suction Filter With One-touch Fittings Series ZFB 1

. 4.76 6.35 9.53 12.7 4.76 6.35 9.53 12.7 Bore size 2.5 4 5 6 6.5 7.5 Bore size 3.48 4.57 6.99 9.56 3.18 4.23 6.35 8.46 BU Blue 3 16 " " Polyurethane Y Yellow 1 4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 Metric size G Green C Note) Clear Inch size Note) Polyurethane only. 13-10-6

NVZseies

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

Process Pump

(Only for PB1011A) Lead wires Lead wires of solenoid valve Note1) Note1)Refer to 6.How to use. 6. How to use 1)Start and stop (1) Connect air piping to air supply port AIR SUP, and fluid transfer piping to suction port FLUID IN and discharge port FLUID OUT. [For PB1011A / Built-in solenoid valve type] Connect the solenoid valve lead wire to DC24V signal wire.

Guide Cylinder

MGC*-OM0002C-2 PRODUCT NAME Guide Cylinder MODEL / Series / Product Number MGC Series Contents Safety Instructions 2 Product Features 4 1. How to Order 5 2. Model/Stroke 6 3. Specifications 6 4. Theoretical Output 6 5. Weight 7 6. Moving Parts Weight 7 7. Allowable Kinetic Energy by Air Cushion Mechanism 7 8. Design/Selection 8 9. Installations/Adjustment 9 10. Piping 11 11.

Precision Regulator

(C) m2 Main valve MPa/ m (S) 1 1 Displ m Displ m Daiph (A) m2 press MPa Press Press. spring Compd. spring Compd. MPa MPa (A) m/N (B) m/N Force N Diaph. (C) m2 Daiph.(A) m2 Force N Block diagram -6- 3.

High Vacuum L Type Valve

Description XLS-16XLS-16-P XLS-25XLS-25-P (2) Coil assembly XLS16-20-*G,C,D,T XLS16-20-P*G XLS25-20-*G,C,D,T XLS25-20-P*G (6) Core assembly XLS16-30-1 XLS25-30-1 (4) Armature assembly XLS16-30-2 XLS25-30-2 (3-1) Core O-ring AS568-018V AS568-018V (3-2) Bonnet O-ring AS568-025V AS568-030V Note) Enter voltage no. at * G, C, D, and T after * mean the symbol showing an electrical entry. 6 XL

EX260-SPR-A_eng

No.2 No.1 No.4 No.3 No.6 No.5 No.8 No.7 Caution 64 16 32 4 8 1 2 1 0 0 0 0 0 1 0 After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

Precision Regulator

(B) m2 Main valve MPa/ m (S) 1 1 Daiph (A) m2 press Press Press. Displ m Displ m spring Compd. spring Compd. M Pa MPa MPa (A) m/N (B) m/N Force N Diaph.(C) m2 Daiph.(A) m2 Block diagram Force N -6- 3.

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

MHL2

MHL2-40D MHL2-40D1 MHL2-40D2 SMHL2C, #4 SMHL2C, #5 SMHL2C, #6 (#6+#7) 2.2-12

MGC

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Note Clear hard anodized Clear hard anodized Chromated No.

Clean Exhaust Filter

Warning 1.

Turntable Cylinder Series MGT

1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.

3 Way,3 Port Solenoid Valve NVZ Series

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

S Couplers

-04M-1) 8 8 KKA6 Series (KKA6P-04M-1+KKA6S-04M) Flow rate m3/min (ANR) Flow rate m3/min (ANR) 7 7 KKA4 Series (KKA4P-02M-1+KKA4S-02M-1) 6 6 KKA4 Series 5 5 (KKA4P-02M-1+KKA4S-02M) 4 4 3 3 2 2 1 1 KKA3 Series (KKA3P-01M-1+KKA3S-01M) KKA3 Series (KKA3P-01M-1+KKA3S-01M-1) 0 0 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Pressure

/

NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115 VAC] 50/60

AZ1000

installation 6) FV4 MV4 FV6 MV6 TW6 No code P BP Bonnet port (NPT 1/8 inch) 6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

Digital Pressure Switch

Repeatability 1%F.S. 1 digit Hysteresis Hysteresis mode 0 to variable 1 Window comparator mode Output Voltage (rated pressure range) Voltage output 1 to 5 V 2.5%F.S. 2 Linearity 1.5%F.S. 1%F.S.

HEC-OM-Y008

If the power switch is turned on without circulating fluid, the pump could be damaged. 9 Maintenance 10 Troubleshooting 6 Operation Continued 6 Operation Continued 9.1 Daily Check 10.1 Alarm list SET4: Control Setting Mode SET17: Communication Setting Mode Display1,2 Content of alarm Display 1) Indication of display panel: Check temperature condition and confirm Selecting 17 in Setting mode