Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Spec.)
Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage
SMC Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Nozzle Diameter: ø1.0, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: M (0.35 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor
Nozzle Diameter: ø0.5, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)
Nozzle Diameter: ø1.5, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: S (0.45 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual
Nozzle Diameter: ø0.7, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor
Stations: 3 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 5 to 40 L/min, Return Unit Components: w/o Flow Adj.
Stations: 6 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/Flow Adj.
Stations: 3 Stations, Piping: U Side: Open; D Side: Closed, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 5 to 40 L/min, Return Unit Components: w/Flow Adj.
Stations: 4 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 0.5 to 4 L/min, Return Unit Components: w/o Flow Adj.
Stations: 3 Stations, Supply/Return Unit Layout: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 0.5 to 4 L/min, Return Unit Components: w/o Flow Adj.
Stations: 3 Stations, Supply/Return Unit Layout: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 5 to 40 L/min, Return Unit Components: w/Flow Adj.
W-area output end 1 0.00 W-area output end 2 0.00 Origin correction data 0.00 Note1) Become effective after restarting the controller. Note 2) Set the stroke setting value which has the additional distance. When inputting the product stroke, the "stroke limitalarm may be generated. (Code 1-052).
Do not replace V114(G,H,L,M,W) to V115 (DIN terminal), and vice versa. type Coil Varistor type (Ground) W type WA type 10 No.SYJ3000-OMM0002-A SYJ Series/ / / /Specific Product Precautions 4 Be sure to read this before handling How to Use DIN Terminal Connector Assembly with Cover Connector assembly with dust proof protective cover Effective to prevention of short circuit failure due to the
170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1
Temperature rise Lubrication 5.6 VA (50 Hz) 5.0 VA (60 Hz) 3.4 VA (50 Hz) 2.3 VA (60 Hz) 12 VA (50 Hz) 10.5 VA (60 Hz) 7.5 VA (50 Hz) 6 VA (60 Hz) Temperature Apparent power AC Inrush No freezing Holding Power consumption 1.8 W 4.8 W Non-locking push type, Other (Option) Non-locking push type DC Graph (1) VNC2 Pilot Pressure (N.O. type) Manual override 0.5 0.6 0.7 Pilot pressure should be
G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"
min)(ANR) Flow rate (l/min)(ANR) Flow rate (l/min)(ANR) VH600 Effective area S=194mm2 Supply pressure MPa 0.7 0.7 Valve output pressure (MPa) 0.6 0.6 0.5 0.5 0.4 0.4 0.2 0.3 0.3 0.2 0.1 0.1 10 15 0 5 Flow rate (l/min)(ANR) 3.6-7 Hand Valve Series VH Construction VH200 5 6 4 3 1 SlA 7 VlA 8 1 (P) SlA 4 (B) 2 (A) 2 3 (R) VlA VH300 / 400 5 6 VM/VR 4 3 VH 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600
Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. For connector cable of M8 connector, refer to page 646. M8 connector conforming to IEC60947-5-2 is also available. Refer to page 640 for details. Note 1) Enter the cable length symbols in .